Details
| Original language | English |
|---|---|
| Article number | 054202 |
| Journal | Journal of Vacuum Science and Technology B |
| Volume | 40 |
| Issue number | 5 |
| Early online date | 18 Aug 2022 |
| Publication status | Published - Sept 2022 |
Abstract
The industrial use of quantum sensors requires further miniaturization of the experimental peripherals, i.e., the high vacuum chamber, laser technology, and control electronics. A central part of the high vacuum chamber is the maintenance of vacuum conditions. For this purpose, a prototype of a compact, i.e., miniaturized, ultrahigh vacuum pump in the form of a nonevaporable getter (NEG) pump at a wafer level (MEMS), is developed within the scope of this work. With regard to the basic conditions of the functionality of the NEG, a miniaturized heating plate with temperature sensors is analytically and numerically developed, constructed, and characterized in an ultrahigh vacuum test stand. This is followed by the integration of the NEG into the existing system, which, in connection with the characterization of material-specific parameters, enables a first correlation of heat input and pumping power. Thus, performance data of the getter-MEMS under high-vacuum confinement confirm its usability for quantum sensors. In addition, optimization potentials are shown with regard to all partial aspects of the MEMS.
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Instrumentation
- Chemical Engineering(all)
- Process Chemistry and Technology
- Materials Science(all)
- Surfaces, Coatings and Films
- Engineering(all)
- Electrical and Electronic Engineering
- Materials Science(all)
- Materials Chemistry
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In: Journal of Vacuum Science and Technology B, Vol. 40, No. 5, 054202, 09.2022.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - Nonevaporable getter-MEMS for generating UHV conditions in small volumina
AU - Diekmann, Leonard Frank
AU - Kassner, Alexander
AU - Dencker, Folke
AU - Wurz, Marc Christopher
N1 - Funding Information: This work was funded by the Deutsche Forschung sgemeinschaft (DFG, German Research Foundation) under Germany’s Excellence Strategy—EXC-2123 QuantumFrontiers— 390837967. Furthermore, we would like to thank Hiden Analytical and Pfeiffer Vacuum for disclosing the functionality and calibration of the measurement peripherals used.
PY - 2022/9
Y1 - 2022/9
N2 - The industrial use of quantum sensors requires further miniaturization of the experimental peripherals, i.e., the high vacuum chamber, laser technology, and control electronics. A central part of the high vacuum chamber is the maintenance of vacuum conditions. For this purpose, a prototype of a compact, i.e., miniaturized, ultrahigh vacuum pump in the form of a nonevaporable getter (NEG) pump at a wafer level (MEMS), is developed within the scope of this work. With regard to the basic conditions of the functionality of the NEG, a miniaturized heating plate with temperature sensors is analytically and numerically developed, constructed, and characterized in an ultrahigh vacuum test stand. This is followed by the integration of the NEG into the existing system, which, in connection with the characterization of material-specific parameters, enables a first correlation of heat input and pumping power. Thus, performance data of the getter-MEMS under high-vacuum confinement confirm its usability for quantum sensors. In addition, optimization potentials are shown with regard to all partial aspects of the MEMS.
AB - The industrial use of quantum sensors requires further miniaturization of the experimental peripherals, i.e., the high vacuum chamber, laser technology, and control electronics. A central part of the high vacuum chamber is the maintenance of vacuum conditions. For this purpose, a prototype of a compact, i.e., miniaturized, ultrahigh vacuum pump in the form of a nonevaporable getter (NEG) pump at a wafer level (MEMS), is developed within the scope of this work. With regard to the basic conditions of the functionality of the NEG, a miniaturized heating plate with temperature sensors is analytically and numerically developed, constructed, and characterized in an ultrahigh vacuum test stand. This is followed by the integration of the NEG into the existing system, which, in connection with the characterization of material-specific parameters, enables a first correlation of heat input and pumping power. Thus, performance data of the getter-MEMS under high-vacuum confinement confirm its usability for quantum sensors. In addition, optimization potentials are shown with regard to all partial aspects of the MEMS.
UR - http://www.scopus.com/inward/record.url?scp=85137098596&partnerID=8YFLogxK
U2 - 10.1116/6.0001991
DO - 10.1116/6.0001991
M3 - Article
AN - SCOPUS:85137098596
VL - 40
JO - Journal of Vacuum Science and Technology B
JF - Journal of Vacuum Science and Technology B
SN - 2166-2746
IS - 5
M1 - 054202
ER -