Details
| Original language | English |
|---|---|
| Pages (from-to) | 153-162 |
| Number of pages | 10 |
| Journal | Machining Science and Technology |
| Volume | 1 |
| Issue number | 1 |
| Publication status | Published - Jan 1997 |
| Externally published | Yes |
Abstract
The manufacturing of microcomponents with excimer lasers, especially for small series and batch production, is an alternative to other established micromanufacturing methods associated with etch-technology. To avoid long nonproductive times, a general and flexible machining concept is presented, which is based on the mask projection of the excimer laser beam. Beginning the process chain with the workpiece design, a developed preprocessor is able to calculate the overall removal volume from computer-aided design (CAD) data and to break down into elementary volumes that are able to be processed with single laser pulses. Moreover, based on the restrictions of the excimer laser process, a set of NC data is generated to automatically start the production process. The reliability of the system is proven with different geometries such as microgear wheels and microlenses.
ASJC Scopus subject areas
- Materials Science(all)
- General Materials Science
- Engineering(all)
- Mechanical Engineering
- Engineering(all)
- Industrial and Manufacturing Engineering
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In: Machining Science and Technology, Vol. 1, No. 1, 01.1997, p. 153-162.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - New machining concept for manufacturing microstructures with excimer lasers
AU - Tönshoff, H. K.
AU - Overmeyer, Ludger
AU - Ostendorf, Andreas
AU - Hesener, Hanno
PY - 1997/1
Y1 - 1997/1
N2 - The manufacturing of microcomponents with excimer lasers, especially for small series and batch production, is an alternative to other established micromanufacturing methods associated with etch-technology. To avoid long nonproductive times, a general and flexible machining concept is presented, which is based on the mask projection of the excimer laser beam. Beginning the process chain with the workpiece design, a developed preprocessor is able to calculate the overall removal volume from computer-aided design (CAD) data and to break down into elementary volumes that are able to be processed with single laser pulses. Moreover, based on the restrictions of the excimer laser process, a set of NC data is generated to automatically start the production process. The reliability of the system is proven with different geometries such as microgear wheels and microlenses.
AB - The manufacturing of microcomponents with excimer lasers, especially for small series and batch production, is an alternative to other established micromanufacturing methods associated with etch-technology. To avoid long nonproductive times, a general and flexible machining concept is presented, which is based on the mask projection of the excimer laser beam. Beginning the process chain with the workpiece design, a developed preprocessor is able to calculate the overall removal volume from computer-aided design (CAD) data and to break down into elementary volumes that are able to be processed with single laser pulses. Moreover, based on the restrictions of the excimer laser process, a set of NC data is generated to automatically start the production process. The reliability of the system is proven with different geometries such as microgear wheels and microlenses.
UR - http://www.scopus.com/inward/record.url?scp=0031199688&partnerID=8YFLogxK
U2 - 10.1080/10940349708945642
DO - 10.1080/10940349708945642
M3 - Article
AN - SCOPUS:0031199688
VL - 1
SP - 153
EP - 162
JO - Machining Science and Technology
JF - Machining Science and Technology
SN - 1091-0344
IS - 1
ER -