Details
| Original language | English |
|---|---|
| Title of host publication | IEEE Sensors, SENSORS 2016 |
| Subtitle of host publication | Proceedings |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| ISBN (electronic) | 9781479982875 |
| Publication status | Published - 5 Jan 2017 |
| Event | 15th IEEE Sensors Conference, SENSORS 2016 - Orlando, United States Duration: 30 Oct 2016 → 3 Nov 2016 |
Publication series
| Name | Proceedings of IEEE Sensors |
|---|---|
| ISSN (Print) | 1930-0395 |
| ISSN (electronic) | 2168-9229 |
Abstract
A new coating system for the deposition of sensors and thin-layers directly onto components of arbitrary size has been invented at the Institute of Micro Production Technology. This system allows for thinner sensors without any carrier substrate and with a higher measuring accuracy. Within this paper, the basic setup and the functional principle of the new coating system is presented. The deposition process sequence is described and the system is characterized concerning layer homogeneity and evacuation time.
Keywords
- direct-deposition, industry 4.0, physical vapor deposition, sensor manufacturing technology, sputtering, thin-layer
ASJC Scopus subject areas
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
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IEEE Sensors, SENSORS 2016: Proceedings. Institute of Electrical and Electronics Engineers Inc., 2017. 7808440 (Proceedings of IEEE Sensors).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - New coating system for direct-deposition of sensors on components of arbitrary size
T2 - 15th IEEE Sensors Conference, SENSORS 2016
AU - Klaas, Daniel
AU - Becker, Jürgen
AU - Wurz, Marc Christopher
AU - Schlosser, Jan
AU - Kunze, Matthias
N1 - Publisher Copyright: © 2016 IEEE. Copyright: Copyright 2017 Elsevier B.V., All rights reserved.
PY - 2017/1/5
Y1 - 2017/1/5
N2 - A new coating system for the deposition of sensors and thin-layers directly onto components of arbitrary size has been invented at the Institute of Micro Production Technology. This system allows for thinner sensors without any carrier substrate and with a higher measuring accuracy. Within this paper, the basic setup and the functional principle of the new coating system is presented. The deposition process sequence is described and the system is characterized concerning layer homogeneity and evacuation time.
AB - A new coating system for the deposition of sensors and thin-layers directly onto components of arbitrary size has been invented at the Institute of Micro Production Technology. This system allows for thinner sensors without any carrier substrate and with a higher measuring accuracy. Within this paper, the basic setup and the functional principle of the new coating system is presented. The deposition process sequence is described and the system is characterized concerning layer homogeneity and evacuation time.
KW - direct-deposition
KW - industry 4.0
KW - physical vapor deposition
KW - sensor manufacturing technology
KW - sputtering
KW - thin-layer
UR - http://www.scopus.com/inward/record.url?scp=85010992209&partnerID=8YFLogxK
U2 - 10.1109/ICSENS.2016.7808440
DO - 10.1109/ICSENS.2016.7808440
M3 - Conference contribution
AN - SCOPUS:85010992209
T3 - Proceedings of IEEE Sensors
BT - IEEE Sensors, SENSORS 2016
PB - Institute of Electrical and Electronics Engineers Inc.
Y2 - 30 October 2016 through 3 November 2016
ER -