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New applications of EPM in metal, oxide and semiconductor processing

Research output: Chapter in book/report/conference proceedingConference contributionResearch

Details

Original languageEnglish
Title of host publicationDriving the engines in change manufacturing
Subtitle of host publication24th ASM Heat Treating Society conference 2007 ; September 17 - 19, 2007, Detroit, Michigan, USA
Place of PublicationOhio
PublisherASM International
Pages45-51
ISBN (print)978-1-60423-930-0
Publication statusPublished - 2007
Event24th ASM Heat Treating Society conference - Detroit
Duration: 17 Sept 200719 Sept 2007
Conference number: 24

Cite this

New applications of EPM in metal, oxide and semiconductor processing. / Nacke, Bernard.
Driving the engines in change manufacturing: 24th ASM Heat Treating Society conference 2007 ; September 17 - 19, 2007, Detroit, Michigan, USA. Ohio: ASM International, 2007. p. 45-51.

Research output: Chapter in book/report/conference proceedingConference contributionResearch

Nacke, B 2007, New applications of EPM in metal, oxide and semiconductor processing. in Driving the engines in change manufacturing: 24th ASM Heat Treating Society conference 2007 ; September 17 - 19, 2007, Detroit, Michigan, USA. ASM International, Ohio, pp. 45-51, 24th ASM Heat Treating Society conference, Detroit, 17 Sept 2007.
Nacke, B. (2007). New applications of EPM in metal, oxide and semiconductor processing. In Driving the engines in change manufacturing: 24th ASM Heat Treating Society conference 2007 ; September 17 - 19, 2007, Detroit, Michigan, USA (pp. 45-51). ASM International.
Nacke B. New applications of EPM in metal, oxide and semiconductor processing. In Driving the engines in change manufacturing: 24th ASM Heat Treating Society conference 2007 ; September 17 - 19, 2007, Detroit, Michigan, USA. Ohio: ASM International. 2007. p. 45-51
Nacke, Bernard. / New applications of EPM in metal, oxide and semiconductor processing. Driving the engines in change manufacturing: 24th ASM Heat Treating Society conference 2007 ; September 17 - 19, 2007, Detroit, Michigan, USA. Ohio : ASM International, 2007. pp. 45-51
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title = "New applications of EPM in metal, oxide and semiconductor processing",
author = "Bernard Nacke",
year = "2007",
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booktitle = "Driving the engines in change manufacturing",
publisher = "ASM International",
address = "United States",
note = "24th ASM Heat Treating Society conference ; Conference date: 17-09-2007 Through 19-09-2007",

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TY - GEN

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AU - Nacke, Bernard

N1 - Conference code: 24

PY - 2007

Y1 - 2007

M3 - Conference contribution

SN - 978-1-60423-930-0

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BT - Driving the engines in change manufacturing

PB - ASM International

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ER -

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