Details
| Original language | English |
|---|---|
| Title of host publication | Optical Interference Coatings, OIC 2016 |
| Publisher | OSA - The Optical Society |
| ISBN (print) | 9781943580132 |
| Publication status | Published - 2016 |
| Event | Optical Interference Coatings, OIC 2016 - Tucson, United States Duration: 19 Jun 2016 → 24 Jun 2016 |
Publication series
| Name | Optics InfoBase Conference Papers |
|---|---|
| ISSN (electronic) | 2162-2701 |
Abstract
A multiple scale model named virtual coater is applied to investigate in the layer properties of growing films in dependence of PVD process conditions. Results for density, roughness, stress, and index of refraction are presented.
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Engineering(all)
- Mechanics of Materials
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Optical Interference Coatings, OIC 2016. OSA - The Optical Society, 2016. (Optics InfoBase Conference Papers).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Multiple scale modeling of PVD sputter processes
AU - Turowski, Marcus
AU - Jupé, M.
AU - Melzig, T.
AU - Pflug, Andreas
AU - Demircan, Ayhan
AU - Ristau, Detlev
PY - 2016
Y1 - 2016
N2 - A multiple scale model named virtual coater is applied to investigate in the layer properties of growing films in dependence of PVD process conditions. Results for density, roughness, stress, and index of refraction are presented.
AB - A multiple scale model named virtual coater is applied to investigate in the layer properties of growing films in dependence of PVD process conditions. Results for density, roughness, stress, and index of refraction are presented.
UR - http://www.scopus.com/inward/record.url?scp=85085846312&partnerID=8YFLogxK
U2 - 10.1364/oic.2016.wb.4
DO - 10.1364/oic.2016.wb.4
M3 - Conference contribution
AN - SCOPUS:85085846312
SN - 9781943580132
T3 - Optics InfoBase Conference Papers
BT - Optical Interference Coatings, OIC 2016
PB - OSA - The Optical Society
T2 - Optical Interference Coatings, OIC 2016
Y2 - 19 June 2016 through 24 June 2016
ER -