Details
| Original language | English |
|---|---|
| Title of host publication | Stability of Thin Films and Nanostructures |
| Publisher | Materials Research Society |
| Pages | 131-136 |
| Number of pages | 6 |
| ISBN (print) | 1558998063, 9781558998063 |
| Publication status | Published - 2004 |
| Externally published | Yes |
| Event | 2004 MRS Fall Meeting - Boston, MA, United States Duration: 29 Nov 2004 → 3 Dec 2004 |
Publication series
| Name | Materials Research Society Symposium Proceedings |
|---|---|
| Volume | 854 |
| ISSN (Print) | 0272-9172 |
Abstract
Au/Cr/Si microcantilevers were studied in their as-deposited condition and annealed state, with emphasis on a thermal treatment of 225 °C for 24 hours. Change in beam curvature was monitored during isothermal hold as a function of time. Secondary grain growth was observed in the gold, which contained non-uniformly distributed twins and dislocation defects, Diffusional transport of the chromium layer was observed during annealing. Nodules arranged in the "rolling hill" topography were observed at the free surface, both before and after annealing. Nanometer thick coatings of alumina grown by atomic layer deposition improved the uniformity of both microstructure evolution and curvature evolution during high-temperature annealing.
ASJC Scopus subject areas
- Materials Science(all)
- General Materials Science
- Physics and Astronomy(all)
- Condensed Matter Physics
- Engineering(all)
- Mechanics of Materials
- Engineering(all)
- Mechanical Engineering
Cite this
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Stability of Thin Films and Nanostructures. Materials Research Society, 2004. p. 131-136 (Materials Research Society Symposium Proceedings; Vol. 854).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Morphology and microstructure evolution of multilayer Au/Cr/Si thin films subject to annealing
AU - Miller, David
AU - Herrmann, Cari
AU - Maier, Hans
AU - George, Steve
AU - Stoldt, Conrad
AU - Gall, Ken
PY - 2004
Y1 - 2004
N2 - Au/Cr/Si microcantilevers were studied in their as-deposited condition and annealed state, with emphasis on a thermal treatment of 225 °C for 24 hours. Change in beam curvature was monitored during isothermal hold as a function of time. Secondary grain growth was observed in the gold, which contained non-uniformly distributed twins and dislocation defects, Diffusional transport of the chromium layer was observed during annealing. Nodules arranged in the "rolling hill" topography were observed at the free surface, both before and after annealing. Nanometer thick coatings of alumina grown by atomic layer deposition improved the uniformity of both microstructure evolution and curvature evolution during high-temperature annealing.
AB - Au/Cr/Si microcantilevers were studied in their as-deposited condition and annealed state, with emphasis on a thermal treatment of 225 °C for 24 hours. Change in beam curvature was monitored during isothermal hold as a function of time. Secondary grain growth was observed in the gold, which contained non-uniformly distributed twins and dislocation defects, Diffusional transport of the chromium layer was observed during annealing. Nodules arranged in the "rolling hill" topography were observed at the free surface, both before and after annealing. Nanometer thick coatings of alumina grown by atomic layer deposition improved the uniformity of both microstructure evolution and curvature evolution during high-temperature annealing.
UR - http://www.scopus.com/inward/record.url?scp=34249912899&partnerID=8YFLogxK
U2 - 10.1557/proc-854-u7.5
DO - 10.1557/proc-854-u7.5
M3 - Conference contribution
AN - SCOPUS:34249912899
SN - 1558998063
SN - 9781558998063
T3 - Materials Research Society Symposium Proceedings
SP - 131
EP - 136
BT - Stability of Thin Films and Nanostructures
PB - Materials Research Society
T2 - 2004 MRS Fall Meeting
Y2 - 29 November 2004 through 3 December 2004
ER -