Details
| Original language | English |
|---|---|
| Article number | 6027638 |
| Pages (from-to) | 3760-3763 |
| Number of pages | 4 |
| Journal | IEEE transactions on magnetics |
| Volume | 47 |
| Issue number | 10 |
| Publication status | Published - Oct 2011 |
Abstract
In order to provide a contactless measurement technique to examine products during the fabrication process, a modular design of an eddy current micro sensor was developed and fabricated in thin-film technology. The sensor consists of two parts, a single-turn excitation coil and an anisotropic magneto-resistance (AMR) sensor. The AMR sensor detects the change of the magnetic field induced in a sample by the excitation coil. Initial investigations were conducted to prove the capability of the completed eddy current micro sensor. A defect was created on the surface of a Cu probe. The electrical output signal of the AMR sensor was subsequently compared to optical measurements of the surface profile of the crack. There is a high correlation between the optical measurements and to those of the eddy current micro sensor.
Keywords
- Eddy current sensor, magnetic micro sensors, micro sensor fabrication, modular sensor concept
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Engineering(all)
- Electrical and Electronic Engineering
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In: IEEE transactions on magnetics, Vol. 47, No. 10, 6027638, 10.2011, p. 3760-3763.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - Modular eddy current micro sensor
AU - Griesbach, Tim
AU - Wurz, Marc Christopher
AU - Rissing, Lutz
N1 - Funding Information: This work was supported in part by the German Research Foundation (DFG) within the Collaborative Research Center (SFB) 653 “Gentelligent Components in their lifecycle.”
PY - 2011/10
Y1 - 2011/10
N2 - In order to provide a contactless measurement technique to examine products during the fabrication process, a modular design of an eddy current micro sensor was developed and fabricated in thin-film technology. The sensor consists of two parts, a single-turn excitation coil and an anisotropic magneto-resistance (AMR) sensor. The AMR sensor detects the change of the magnetic field induced in a sample by the excitation coil. Initial investigations were conducted to prove the capability of the completed eddy current micro sensor. A defect was created on the surface of a Cu probe. The electrical output signal of the AMR sensor was subsequently compared to optical measurements of the surface profile of the crack. There is a high correlation between the optical measurements and to those of the eddy current micro sensor.
AB - In order to provide a contactless measurement technique to examine products during the fabrication process, a modular design of an eddy current micro sensor was developed and fabricated in thin-film technology. The sensor consists of two parts, a single-turn excitation coil and an anisotropic magneto-resistance (AMR) sensor. The AMR sensor detects the change of the magnetic field induced in a sample by the excitation coil. Initial investigations were conducted to prove the capability of the completed eddy current micro sensor. A defect was created on the surface of a Cu probe. The electrical output signal of the AMR sensor was subsequently compared to optical measurements of the surface profile of the crack. There is a high correlation between the optical measurements and to those of the eddy current micro sensor.
KW - Eddy current sensor
KW - magnetic micro sensors
KW - micro sensor fabrication
KW - modular sensor concept
UR - http://www.scopus.com/inward/record.url?scp=80053548906&partnerID=8YFLogxK
U2 - 10.1109/TMAG.2011.2155629
DO - 10.1109/TMAG.2011.2155629
M3 - Article
AN - SCOPUS:80053548906
VL - 47
SP - 3760
EP - 3763
JO - IEEE transactions on magnetics
JF - IEEE transactions on magnetics
SN - 0018-9464
IS - 10
M1 - 6027638
ER -