Modelling the Annealing of Poly-Si/SiOx/c-Si Junctions

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Authors

  • Nils Folchert
  • Stefan Bordihn
  • Robby Peibst
  • Rolf Brendel

External Research Organisations

  • Institute for Solar Energy Research (ISFH)
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Details

Original languageEnglish
Title of host publicationSiliconPV 2021 - 11th International Conference on Crystalline Silicon Photovoltaics
EditorsRolf Brendel, Christophe Ballif, Sebastien Dubois, Stefan Glunz, Giso Hahn, Jef Poortmans, Pierre Verlinden, Arthur Weeber
ISBN (electronic)9780735443624
Publication statusPublished - 24 Aug 2022
Event11th International Conference on Crystalline Silicon Photovoltaics, SiliconPV 2021 - Hamelin, Virtual, Germany
Duration: 19 Apr 202123 Apr 2021

Publication series

NameAIP Conference Proceedings
Volume2487
ISSN (Print)0094-243X
ISSN (electronic)1551-7616

Abstract

We use the MarcoPOLO model for the calculation of recombination and contact resistances of poly-Si-based junctions (such as POLO or TOPCon) to quantify the density of states Dit,cSi at the SiOx/c-Si interface of n+/n-type poly-Si based junctions during annealing. We compare the calculations to measurements of the recombination parameter, contact resistance and temperature-dependent contact resistance measurements and describe these measurements with the same set of parameters. We find that a constant Dit,cSi can explain the change of the recombination parameter J0 with increasing annealing temperature. The MarcoPOLO model allows the structural analysis and hence paths for the optimization of poly-Si junctions by e.g. a shallow diffusion below the interfacial oxide.

ASJC Scopus subject areas

Cite this

Modelling the Annealing of Poly-Si/SiOx/c-Si Junctions. / Folchert, Nils; Bordihn, Stefan; Peibst, Robby et al.
SiliconPV 2021 - 11th International Conference on Crystalline Silicon Photovoltaics. ed. / Rolf Brendel; Christophe Ballif; Sebastien Dubois; Stefan Glunz; Giso Hahn; Jef Poortmans; Pierre Verlinden; Arthur Weeber. 2022. 020006 (AIP Conference Proceedings; Vol. 2487).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Folchert, N, Bordihn, S, Peibst, R & Brendel, R 2022, Modelling the Annealing of Poly-Si/SiOx/c-Si Junctions. in R Brendel, C Ballif, S Dubois, S Glunz, G Hahn, J Poortmans, P Verlinden & A Weeber (eds), SiliconPV 2021 - 11th International Conference on Crystalline Silicon Photovoltaics., 020006, AIP Conference Proceedings, vol. 2487, 11th International Conference on Crystalline Silicon Photovoltaics, SiliconPV 2021, Hamelin, Virtual, Germany, 19 Apr 2021. https://doi.org/10.1063/5.0089597
Folchert, N., Bordihn, S., Peibst, R., & Brendel, R. (2022). Modelling the Annealing of Poly-Si/SiOx/c-Si Junctions. In R. Brendel, C. Ballif, S. Dubois, S. Glunz, G. Hahn, J. Poortmans, P. Verlinden, & A. Weeber (Eds.), SiliconPV 2021 - 11th International Conference on Crystalline Silicon Photovoltaics Article 020006 (AIP Conference Proceedings; Vol. 2487). https://doi.org/10.1063/5.0089597
Folchert N, Bordihn S, Peibst R, Brendel R. Modelling the Annealing of Poly-Si/SiOx/c-Si Junctions. In Brendel R, Ballif C, Dubois S, Glunz S, Hahn G, Poortmans J, Verlinden P, Weeber A, editors, SiliconPV 2021 - 11th International Conference on Crystalline Silicon Photovoltaics. 2022. 020006. (AIP Conference Proceedings). doi: 10.1063/5.0089597
Folchert, Nils ; Bordihn, Stefan ; Peibst, Robby et al. / Modelling the Annealing of Poly-Si/SiOx/c-Si Junctions. SiliconPV 2021 - 11th International Conference on Crystalline Silicon Photovoltaics. editor / Rolf Brendel ; Christophe Ballif ; Sebastien Dubois ; Stefan Glunz ; Giso Hahn ; Jef Poortmans ; Pierre Verlinden ; Arthur Weeber. 2022. (AIP Conference Proceedings).
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abstract = "We use the MarcoPOLO model for the calculation of recombination and contact resistances of poly-Si-based junctions (such as POLO or TOPCon) to quantify the density of states Dit,cSi at the SiOx/c-Si interface of n+/n-type poly-Si based junctions during annealing. We compare the calculations to measurements of the recombination parameter, contact resistance and temperature-dependent contact resistance measurements and describe these measurements with the same set of parameters. We find that a constant Dit,cSi can explain the change of the recombination parameter J0 with increasing annealing temperature. The MarcoPOLO model allows the structural analysis and hence paths for the optimization of poly-Si junctions by e.g. a shallow diffusion below the interfacial oxide.",
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N1 - Funding Information: This work was supported by the Ministry for Science and Culture of lower Saxony (project vOx), by the European Union's Horizon 2020 Programme for research, technological development and demonstration Grant Agreements no. 727529 (project DISC) and by the Federal Ministry for Economic Affairs and Energy under grant no 0324171C (project Nextstep).

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