Details
| Original language | English |
|---|---|
| Title of host publication | Optical Interference Coatings |
| Subtitle of host publication | OIC 2013 |
| Publisher | OSA - The Optical Society |
| ISBN (print) | 9781557529701 |
| Publication status | Published - 2013 |
| Event | Optical Interference Coatings, OIC 2013 - Whistler, Canada Duration: 16 Jun 2013 → 21 Jun 2013 |
Publication series
| Name | Optics InfoBase Conference Papers |
|---|---|
| ISSN (electronic) | 2162-2701 |
Abstract
Classical molecular dynamics techniques are used for modeling Al2O3 thin film growth according to modern ion coating processes. Results for surface roughness and film density dependent on deposition energy are presented.
ASJC Scopus subject areas
- Physics and Astronomy(all)
- Instrumentation
- Physics and Astronomy(all)
- Atomic and Molecular Physics, and Optics
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Optical Interference Coatings: OIC 2013. OSA - The Optical Society, 2013. (Optics InfoBase Conference Papers).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Modeling of Al2O3 thin film growth in modern ion coating processes
AU - Turowski, Marcus
AU - Ehlers, Henrik
AU - Heinrich, K.
AU - Ristau, Detlev
PY - 2013
Y1 - 2013
N2 - Classical molecular dynamics techniques are used for modeling Al2O3 thin film growth according to modern ion coating processes. Results for surface roughness and film density dependent on deposition energy are presented.
AB - Classical molecular dynamics techniques are used for modeling Al2O3 thin film growth according to modern ion coating processes. Results for surface roughness and film density dependent on deposition energy are presented.
UR - http://www.scopus.com/inward/record.url?scp=85085778693&partnerID=8YFLogxK
U2 - 10.1364/oic.2013.ma.8
DO - 10.1364/oic.2013.ma.8
M3 - Conference contribution
AN - SCOPUS:85085778693
SN - 9781557529701
T3 - Optics InfoBase Conference Papers
BT - Optical Interference Coatings
PB - OSA - The Optical Society
T2 - Optical Interference Coatings, OIC 2013
Y2 - 16 June 2013 through 21 June 2013
ER -