Details
| Original language | English |
|---|---|
| Pages (from-to) | 8139-8143 |
| Number of pages | 5 |
| Journal | THIN SOLID FILMS |
| Volume | 519 |
| Issue number | 22 |
| Early online date | 15 Jun 2011 |
| Publication status | Published - 1 Sept 2011 |
Abstract
(111) oriented thin film Pt electrodes were prepared on single crystals of yttrium-stabilized zirconia (YSZ) by sputter deposition of platinum. The electrodes were characterized by scanning electron microscopy (SEM), transmission electron microscopy (TEM), selected area electron diffraction (SAED), X-ray diffraction (XRD), energy-dispersive X-ray analysis (EDX), atomic force microscopy (AFM) and by profilometry. SEM images of the as-sputtered platinum film show a compact amorphous Pt film covering uniformly the substrate. Upon annealing at 1123 K, gaps and pores at the interface develop leading to a partial dewetting of the Pt film. Increasing the annealing temperature to 1373 K transforms the polycrystalline Pt film into single crystalline grains exhibiting a (111) orientation towards the substrate.
Keywords
- Dewetting, Interface, Platinum, Sputter deposition, Yttrium-stabilized zirconia
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Surfaces and Interfaces
- Materials Science(all)
- Surfaces, Coatings and Films
- Materials Science(all)
- Metals and Alloys
- Materials Science(all)
- Materials Chemistry
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In: THIN SOLID FILMS, Vol. 519, No. 22, 01.09.2011, p. 8139-8143.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - Microstructure of thin film platinum electrodes on yttrium stabilized zirconia prepared by sputter deposition
AU - Toghan, Arafat
AU - Khodari, M.
AU - Steinbach, F.
AU - Imbihl, R.
N1 - Funding Information: This work was supported by the German Research Foundation (DFG). A. T. thanks the Egyptian Ministry of Higher Education for providing him a doctoral scholarship. The authors are indebted to. V. Yarovyi and K. Efimov for assistance with the TEM and XRD measurements.
PY - 2011/9/1
Y1 - 2011/9/1
N2 - (111) oriented thin film Pt electrodes were prepared on single crystals of yttrium-stabilized zirconia (YSZ) by sputter deposition of platinum. The electrodes were characterized by scanning electron microscopy (SEM), transmission electron microscopy (TEM), selected area electron diffraction (SAED), X-ray diffraction (XRD), energy-dispersive X-ray analysis (EDX), atomic force microscopy (AFM) and by profilometry. SEM images of the as-sputtered platinum film show a compact amorphous Pt film covering uniformly the substrate. Upon annealing at 1123 K, gaps and pores at the interface develop leading to a partial dewetting of the Pt film. Increasing the annealing temperature to 1373 K transforms the polycrystalline Pt film into single crystalline grains exhibiting a (111) orientation towards the substrate.
AB - (111) oriented thin film Pt electrodes were prepared on single crystals of yttrium-stabilized zirconia (YSZ) by sputter deposition of platinum. The electrodes were characterized by scanning electron microscopy (SEM), transmission electron microscopy (TEM), selected area electron diffraction (SAED), X-ray diffraction (XRD), energy-dispersive X-ray analysis (EDX), atomic force microscopy (AFM) and by profilometry. SEM images of the as-sputtered platinum film show a compact amorphous Pt film covering uniformly the substrate. Upon annealing at 1123 K, gaps and pores at the interface develop leading to a partial dewetting of the Pt film. Increasing the annealing temperature to 1373 K transforms the polycrystalline Pt film into single crystalline grains exhibiting a (111) orientation towards the substrate.
KW - Dewetting
KW - Interface
KW - Platinum
KW - Sputter deposition
KW - Yttrium-stabilized zirconia
UR - http://www.scopus.com/inward/record.url?scp=80052119029&partnerID=8YFLogxK
U2 - 10.1016/j.tsf.2011.06.018
DO - 10.1016/j.tsf.2011.06.018
M3 - Article
AN - SCOPUS:80052119029
VL - 519
SP - 8139
EP - 8143
JO - THIN SOLID FILMS
JF - THIN SOLID FILMS
SN - 0040-6090
IS - 22
ER -