Details
| Original language | English |
|---|---|
| Article number | 659 |
| Pages (from-to) | 659-664 |
| Number of pages | 6 |
| Journal | Microsystem Technologies |
| Volume | 12 |
| Issue number | 7 |
| Early online date | 21 Apr 2006 |
| Publication status | Published - Jun 2006 |
Abstract
By means of experiments it could determined that micro-machining processes as grinding drilling and milling are a good addition to the established production technologies in micro technology. To machine hard and brittle materials grinding with diamond tools is well suitable but the kinematics of the grinding process as well as the process strategy has a significant influence on the machined surface quality and the chipping of the edges. The study of micro-machining processes showed that micro cutting processes are not just a miniaturisation of the conventional cutting technology. The reduced tool stiffness of micro drills caused by the changes of geometry requires an adjustment of the complete drilling processes. Sharp cutting edges are an essential requirement for the fabrication of very small structures. So using single edged micro milling cutters made of diamond significant smaller structures could be made compared to using conventional milling cutters made of tungsten carbide. Furthermore acoustic emission sensors proved to be suitable for detecting the tool position after a change of the tool with a high accuracy.
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Hardware and Architecture
- Engineering(all)
- Electrical and Electronic Engineering
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In: Microsystem Technologies, Vol. 12, No. 7, 659, 06.2006, p. 659-664.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - Micro-machining processes for microsystem technology
AU - Denkena, B.
AU - Hoffmeister, H. W.
AU - Reichstein, M.
AU - Illenseer, S.
AU - Hlavac, M.
PY - 2006/6
Y1 - 2006/6
N2 - By means of experiments it could determined that micro-machining processes as grinding drilling and milling are a good addition to the established production technologies in micro technology. To machine hard and brittle materials grinding with diamond tools is well suitable but the kinematics of the grinding process as well as the process strategy has a significant influence on the machined surface quality and the chipping of the edges. The study of micro-machining processes showed that micro cutting processes are not just a miniaturisation of the conventional cutting technology. The reduced tool stiffness of micro drills caused by the changes of geometry requires an adjustment of the complete drilling processes. Sharp cutting edges are an essential requirement for the fabrication of very small structures. So using single edged micro milling cutters made of diamond significant smaller structures could be made compared to using conventional milling cutters made of tungsten carbide. Furthermore acoustic emission sensors proved to be suitable for detecting the tool position after a change of the tool with a high accuracy.
AB - By means of experiments it could determined that micro-machining processes as grinding drilling and milling are a good addition to the established production technologies in micro technology. To machine hard and brittle materials grinding with diamond tools is well suitable but the kinematics of the grinding process as well as the process strategy has a significant influence on the machined surface quality and the chipping of the edges. The study of micro-machining processes showed that micro cutting processes are not just a miniaturisation of the conventional cutting technology. The reduced tool stiffness of micro drills caused by the changes of geometry requires an adjustment of the complete drilling processes. Sharp cutting edges are an essential requirement for the fabrication of very small structures. So using single edged micro milling cutters made of diamond significant smaller structures could be made compared to using conventional milling cutters made of tungsten carbide. Furthermore acoustic emission sensors proved to be suitable for detecting the tool position after a change of the tool with a high accuracy.
UR - http://www.scopus.com/inward/record.url?scp=33646930159&partnerID=8YFLogxK
U2 - 10.1007/s00542-006-0089-z
DO - 10.1007/s00542-006-0089-z
M3 - Article
AN - SCOPUS:33646930159
VL - 12
SP - 659
EP - 664
JO - Microsystem Technologies
JF - Microsystem Technologies
SN - 0946-7076
IS - 7
M1 - 659
ER -