Details
| Original language | English |
|---|---|
| Title of host publication | Micromachined Devices and Components V |
| Place of Publication | Bellingham |
| Publisher | SPIE |
| Pages | 238-245 |
| Number of pages | 8 |
| ISBN (print) | 0-8194-3473-6 |
| Publication status | Published - 31 Aug 1999 |
| Externally published | Yes |
| Event | Symposium on Micromachining and Microfabrication - Santa Clara, United States Duration: 20 Sept 1999 → 21 Sept 1999 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Publisher | SPIE |
| Volume | 3876 |
| ISSN (Print) | 0277-786X |
Abstract
In the course of a progressive miniaturization of complex measuring systems conventional flame ionization detectors and flame spectrometers are no longer competitive with the new generation of mobile analysis systems. This paper presents a micro flame ionization detector and flame spectrometer structured by methods of the microsystem technology. Main component is a micro burner unit with a reduced oxyhydrogen consumption to realize a stable miniature oxyhydrogen flame. The required oxyhydrogen is generated by electrolysis in a miniaturized electrolysis cell at low energy consumption. Thus the electrolyzer can be battery operated. Due to the reduced amount of explosive oxyhydrogen and the small dimensions of the gas supply micro flame analyzers have an unlimited mobility without safety restrictions and are easy to handle. Furthermore they have a high sensitivity and selectivity similar to conventional systems. Concentrations down to one ppm are detectable up to now with the micro flame ionization detector. The micro flame spectrometer is in its initial stage. First measurements to demonstrate the further possibilities of such a microsystem are presented.
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
Sustainable Development Goals
Cite this
- Standard
- Harvard
- Apa
- Vancouver
- BibTeX
- RIS
Micromachined Devices and Components V. Bellingham: SPIE, 1999. p. 238-245 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 3876).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Micromachined flame ionization detector and flame spectrometer
AU - Zimmermann, S.
AU - Wischhusen, S.
AU - Mueller, J.
PY - 1999/8/31
Y1 - 1999/8/31
N2 - In the course of a progressive miniaturization of complex measuring systems conventional flame ionization detectors and flame spectrometers are no longer competitive with the new generation of mobile analysis systems. This paper presents a micro flame ionization detector and flame spectrometer structured by methods of the microsystem technology. Main component is a micro burner unit with a reduced oxyhydrogen consumption to realize a stable miniature oxyhydrogen flame. The required oxyhydrogen is generated by electrolysis in a miniaturized electrolysis cell at low energy consumption. Thus the electrolyzer can be battery operated. Due to the reduced amount of explosive oxyhydrogen and the small dimensions of the gas supply micro flame analyzers have an unlimited mobility without safety restrictions and are easy to handle. Furthermore they have a high sensitivity and selectivity similar to conventional systems. Concentrations down to one ppm are detectable up to now with the micro flame ionization detector. The micro flame spectrometer is in its initial stage. First measurements to demonstrate the further possibilities of such a microsystem are presented.
AB - In the course of a progressive miniaturization of complex measuring systems conventional flame ionization detectors and flame spectrometers are no longer competitive with the new generation of mobile analysis systems. This paper presents a micro flame ionization detector and flame spectrometer structured by methods of the microsystem technology. Main component is a micro burner unit with a reduced oxyhydrogen consumption to realize a stable miniature oxyhydrogen flame. The required oxyhydrogen is generated by electrolysis in a miniaturized electrolysis cell at low energy consumption. Thus the electrolyzer can be battery operated. Due to the reduced amount of explosive oxyhydrogen and the small dimensions of the gas supply micro flame analyzers have an unlimited mobility without safety restrictions and are easy to handle. Furthermore they have a high sensitivity and selectivity similar to conventional systems. Concentrations down to one ppm are detectable up to now with the micro flame ionization detector. The micro flame spectrometer is in its initial stage. First measurements to demonstrate the further possibilities of such a microsystem are presented.
UR - http://www.scopus.com/inward/record.url?scp=0033309888&partnerID=8YFLogxK
U2 - 10.1117/12.360499
DO - 10.1117/12.360499
M3 - Conference contribution
AN - SCOPUS:0033309888
SN - 0-8194-3473-6
T3 - Proceedings of SPIE - The International Society for Optical Engineering
SP - 238
EP - 245
BT - Micromachined Devices and Components V
PB - SPIE
CY - Bellingham
T2 - Symposium on Micromachining and Microfabrication
Y2 - 20 September 1999 through 21 September 1999
ER -