Micro and nano fabrication: Tools and processes

Research output: Book/Report › Monograph › Research › peer review

Authors

  • Hans H. Gatzen
  • Volker Saile
  • Jürg Leuthold

Research Organisations

External Research Organisations

  • Karlsruhe Institute of Technology (KIT)
  • ETH Zurich
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Details

Original languageEnglish
Number of pages519
ISBN (electronic)9783662443958
Publication statusPublished - 1 Jan 2015

Abstract

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

ASJC Scopus subject areas

Cite this

Micro and nano fabrication: Tools and processes. / Gatzen, Hans H.; Saile, Volker; Leuthold, Jürg.
2015. 519 p.

Research output: Book/Report › Monograph › Research › peer review

Gatzen HH, Saile V, Leuthold J. Micro and nano fabrication: Tools and processes. 2015. 519 p. doi: 10.1007/978-3-662-44395-8
Gatzen, Hans H. ; Saile, Volker ; Leuthold, Jürg. / Micro and nano fabrication : Tools and processes. 2015. 519 p.
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