Loading [MathJax]/extensions/tex2jax.js

METHODS AND FABRICATION TOOLS FOR FABRICATING OPTICAL DEVICES

Research output: Patent

Inventors

  • Andreas Schell (Inventor)
  • Joachim Fischer (Inventor)
  • Johannes Kaschke (Inventor)
  • Oliver Benson (Inventor)

Research Organisations

External Research Organisations

  • Humboldt-Universität zu Berlin (HU Berlin)
  • Karlsruhe Institute of Technology (KIT)

Details

Original languageEnglish
Patent numberUS2014302442
IPCG03F 7/ 20 A I
Priority date4 Apr 2013
Publication statusPublished - 9 Oct 2014

Abstract

An embodiment of the present invention relates to a method of fabricating an optical device, the method comprising the steps of: depositing a photoresist layer on a carrier, said photoresist layer containing at least one optical component, determining the position of the at least one optical component inside the photoresist layer before exposing the photoresist layer to a first radiation, said first radiation being capable of transforming the photoresist layer from an unmodified state to a modified state, elaborating a device pattern based on the position of the at least one optical component, and fabricating the elaborated device pattern by locally exposing the photoresist layer to the first radiation and locally transforming the photoresist layer from the unmodified state to the modified state.

Cite this

METHODS AND FABRICATION TOOLS FOR FABRICATING OPTICAL DEVICES. / Schell, Andreas (Inventor); Fischer, Joachim (Inventor); Kaschke, Johannes (Inventor) et al.
Patent No.: US2014302442. Oct 09, 2014.

Research output: Patent

Schell, A, Fischer, J, Kaschke, J, Benson, O & Wegener, M Oct. 09 2014, METHODS AND FABRICATION TOOLS FOR FABRICATING OPTICAL DEVICES, Patent No. US2014302442.
Schell, A., Fischer, J., Kaschke, J., Benson, O., & Wegener, M. (2014). METHODS AND FABRICATION TOOLS FOR FABRICATING OPTICAL DEVICES. (Patent No. US2014302442).
Schell A, Fischer J, Kaschke J, Benson O, Wegener M, inventors. METHODS AND FABRICATION TOOLS FOR FABRICATING OPTICAL DEVICES. US2014302442. 2014 Oct 9.
Schell, Andreas (Inventor) ; Fischer, Joachim (Inventor) ; Kaschke, Johannes (Inventor) et al. / METHODS AND FABRICATION TOOLS FOR FABRICATING OPTICAL DEVICES. Patent No.: US2014302442. Oct 09, 2014.
Download
@misc{b05baa1dea4141c8b1943964797cb929,
title = "METHODS AND FABRICATION TOOLS FOR FABRICATING OPTICAL DEVICES",
abstract = "An embodiment of the present invention relates to a method of fabricating an optical device, the method comprising the steps of: depositing a photoresist layer on a carrier, said photoresist layer containing at least one optical component, determining the position of the at least one optical component inside the photoresist layer before exposing the photoresist layer to a first radiation, said first radiation being capable of transforming the photoresist layer from an unmodified state to a modified state, elaborating a device pattern based on the position of the at least one optical component, and fabricating the elaborated device pattern by locally exposing the photoresist layer to the first radiation and locally transforming the photoresist layer from the unmodified state to the modified state.",
author = "Andreas Schell and Joachim Fischer and Johannes Kaschke and Oliver Benson and Martin Wegener",
year = "2014",
month = oct,
day = "9",
language = "English",
type = "Patent",
note = "US2014302442; G03F 7/ 20 A I",

}

Download

TY - PAT

T1 - METHODS AND FABRICATION TOOLS FOR FABRICATING OPTICAL DEVICES

AU - Schell, Andreas

AU - Fischer, Joachim

AU - Kaschke, Johannes

AU - Benson, Oliver

AU - Wegener, Martin

PY - 2014/10/9

Y1 - 2014/10/9

N2 - An embodiment of the present invention relates to a method of fabricating an optical device, the method comprising the steps of: depositing a photoresist layer on a carrier, said photoresist layer containing at least one optical component, determining the position of the at least one optical component inside the photoresist layer before exposing the photoresist layer to a first radiation, said first radiation being capable of transforming the photoresist layer from an unmodified state to a modified state, elaborating a device pattern based on the position of the at least one optical component, and fabricating the elaborated device pattern by locally exposing the photoresist layer to the first radiation and locally transforming the photoresist layer from the unmodified state to the modified state.

AB - An embodiment of the present invention relates to a method of fabricating an optical device, the method comprising the steps of: depositing a photoresist layer on a carrier, said photoresist layer containing at least one optical component, determining the position of the at least one optical component inside the photoresist layer before exposing the photoresist layer to a first radiation, said first radiation being capable of transforming the photoresist layer from an unmodified state to a modified state, elaborating a device pattern based on the position of the at least one optical component, and fabricating the elaborated device pattern by locally exposing the photoresist layer to the first radiation and locally transforming the photoresist layer from the unmodified state to the modified state.

M3 - Patent

M1 - US2014302442

ER -