Details
| Original language | English |
|---|---|
| Title of host publication | Modeling Aspects in Optical Metrology IV |
| Number of pages | 10 |
| Publication status | Published - 13 May 2013 |
| Event | Modelling Aspects in Optical Metrology 2013 - Munich, Germany Duration: 13 May 2013 → 14 May 2013 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Volume | 8789 |
| ISSN (Print) | 0277-786X |
| ISSN (electronic) | 1996-756X |
Abstract
Image stitching is a technique used to measure large surface areas with high resolution while maintaining a large field of view. We work on improving data fusion by stitching in the field of microscopic analysis of technical surfaces for structures and roughness. Guidance errors and imaging errors such as noise cause problems for seamless image fusion of technical surfaces. The optical imaging errors of 3D Microscopes, such as confocal microscopes and white light interferometers, as well as the guidance errors of their automated positioning systems have been measured to create a software to simulate automated measurements of known surfaces with specific deviations to test new stitching algorithms. We measured and incorporated radial image distortion, interferometer reference mirror shape deviations, statistical noise, drift of the positional axis, on-axis-accuracy and repeatability of the used positioning stages and misalignment of the CCD-Chip with respect to the axes of motion. We used the resulting simulation of the measurement process to test a new image registration technique that allows for the use of correlation of images by fast fourier transform for small overlaps between single measurements.
Keywords
- 3D microscopy, Confocal microscopy, Data fusion, Image acquisition, Image alignment, Stitching, White-light interferometry
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
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- BibTeX
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Modeling Aspects in Optical Metrology IV. 2013. 87890G (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8789).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Measurement Based Simulation of Microscope Deviations for Evaluation of Stitching Algorithms for the Extension of Fourier - based Alignment
AU - Engelke, Florian
AU - Kästner, Markus
AU - Reithmeier, Eduard
PY - 2013/5/13
Y1 - 2013/5/13
N2 - Image stitching is a technique used to measure large surface areas with high resolution while maintaining a large field of view. We work on improving data fusion by stitching in the field of microscopic analysis of technical surfaces for structures and roughness. Guidance errors and imaging errors such as noise cause problems for seamless image fusion of technical surfaces. The optical imaging errors of 3D Microscopes, such as confocal microscopes and white light interferometers, as well as the guidance errors of their automated positioning systems have been measured to create a software to simulate automated measurements of known surfaces with specific deviations to test new stitching algorithms. We measured and incorporated radial image distortion, interferometer reference mirror shape deviations, statistical noise, drift of the positional axis, on-axis-accuracy and repeatability of the used positioning stages and misalignment of the CCD-Chip with respect to the axes of motion. We used the resulting simulation of the measurement process to test a new image registration technique that allows for the use of correlation of images by fast fourier transform for small overlaps between single measurements.
AB - Image stitching is a technique used to measure large surface areas with high resolution while maintaining a large field of view. We work on improving data fusion by stitching in the field of microscopic analysis of technical surfaces for structures and roughness. Guidance errors and imaging errors such as noise cause problems for seamless image fusion of technical surfaces. The optical imaging errors of 3D Microscopes, such as confocal microscopes and white light interferometers, as well as the guidance errors of their automated positioning systems have been measured to create a software to simulate automated measurements of known surfaces with specific deviations to test new stitching algorithms. We measured and incorporated radial image distortion, interferometer reference mirror shape deviations, statistical noise, drift of the positional axis, on-axis-accuracy and repeatability of the used positioning stages and misalignment of the CCD-Chip with respect to the axes of motion. We used the resulting simulation of the measurement process to test a new image registration technique that allows for the use of correlation of images by fast fourier transform for small overlaps between single measurements.
KW - 3D microscopy
KW - Confocal microscopy
KW - Data fusion
KW - Image acquisition
KW - Image alignment
KW - Stitching
KW - White-light interferometry
UR - http://www.scopus.com/inward/record.url?scp=84880380791&partnerID=8YFLogxK
U2 - 10.1117/12.2020595
DO - 10.1117/12.2020595
M3 - Conference contribution
AN - SCOPUS:84880380791
SN - 9780819496058
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Modeling Aspects in Optical Metrology IV
T2 - Modelling Aspects in Optical Metrology 2013
Y2 - 13 May 2013 through 14 May 2013
ER -