Details
Original language | English |
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Qualification | Doctor rerum naturalium |
Awarding Institution | |
Supervised by |
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Date of Award | 27 Sept 2019 |
Place of Publication | Hannover |
Publication status | Published - 2019 |
Abstract
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Hannover, 2019. 74 p.
Research output: Thesis › Doctoral thesis
}
TY - BOOK
T1 - Mathematical modelling and analysis of temperature effects in MEMS
AU - Würth, Tim
N1 - Funding Information: I thank the IRTG 1627 for the financial support and the regular workshops
PY - 2019
Y1 - 2019
N2 - This thesis is concerned with the mathematical analysis of models for Micro-Electro-Mechanical Systems (MEMS). These models arise in the form of coupled partial differential equations with a moving boundary. Although MEMS devices are often operated in non-isothermal environments, temperature is usually neglected in the mathematical investigations. Therefore the focus of our modelling is to incorporate temperature and the related material properties. We derive two models, both of which focus on different aspects of the underlying physics. Afterwards we prove local well-posedness in time and also global well-posedness under additional assumptions on the model's parameters. Lastly, we provide some numerical results which exemplify how temperature and the model's material constants change the qualitative behaviour of the system.
AB - This thesis is concerned with the mathematical analysis of models for Micro-Electro-Mechanical Systems (MEMS). These models arise in the form of coupled partial differential equations with a moving boundary. Although MEMS devices are often operated in non-isothermal environments, temperature is usually neglected in the mathematical investigations. Therefore the focus of our modelling is to incorporate temperature and the related material properties. We derive two models, both of which focus on different aspects of the underlying physics. Afterwards we prove local well-posedness in time and also global well-posedness under additional assumptions on the model's parameters. Lastly, we provide some numerical results which exemplify how temperature and the model's material constants change the qualitative behaviour of the system.
U2 - 10.15488/5492
DO - 10.15488/5492
M3 - Doctoral thesis
CY - Hannover
ER -