Details
| Original language | English |
|---|---|
| Title of host publication | Virtual Design and Validation |
| Pages | 45-59 |
| Number of pages | 15 |
| ISBN (electronic) | 978-3-030-38156-1 |
| Publication status | Published - 2020 |
Publication series
| Name | Lecture Notes in Applied and Computational Mechanics |
|---|---|
| Volume | 93 |
| ISSN (Print) | 1613-7736 |
| ISSN (electronic) | 1860-0816 |
Abstract
Of concern is the mathematical analysis of models for Micro-Electro-Mechanical Systems (MEMS). These models consist of coupled partial differential equations with a moving boundary. Although MEMS devices are often operated in non-isothermal environments, temperature is usually neglected in the mathematical investigations. Therefore the focus of our modelling is to incorporate temperature and the related material properties. We derive a model which allows us focus on different aspects of the underlying physics. Finally we analyse a simplified version of this model: The Small Aspect Ratio Limit.
ASJC Scopus subject areas
- Engineering(all)
- Mechanical Engineering
- Computer Science(all)
- Computational Theory and Mathematics
Cite this
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Virtual Design and Validation. 2020. p. 45-59 (Lecture Notes in Applied and Computational Mechanics; Vol. 93).
Research output: Chapter in book/report/conference proceeding › Contribution to book/anthology › Research › peer review
}
TY - CHAP
T1 - Mathematical Modelling and Analysis of Temperature Effects in MEMS
AU - Escher, Joachim
AU - Würth, Tim
PY - 2020
Y1 - 2020
N2 - Of concern is the mathematical analysis of models for Micro-Electro-Mechanical Systems (MEMS). These models consist of coupled partial differential equations with a moving boundary. Although MEMS devices are often operated in non-isothermal environments, temperature is usually neglected in the mathematical investigations. Therefore the focus of our modelling is to incorporate temperature and the related material properties. We derive a model which allows us focus on different aspects of the underlying physics. Finally we analyse a simplified version of this model: The Small Aspect Ratio Limit.
AB - Of concern is the mathematical analysis of models for Micro-Electro-Mechanical Systems (MEMS). These models consist of coupled partial differential equations with a moving boundary. Although MEMS devices are often operated in non-isothermal environments, temperature is usually neglected in the mathematical investigations. Therefore the focus of our modelling is to incorporate temperature and the related material properties. We derive a model which allows us focus on different aspects of the underlying physics. Finally we analyse a simplified version of this model: The Small Aspect Ratio Limit.
UR - http://www.scopus.com/inward/record.url?scp=85081551578&partnerID=8YFLogxK
U2 - 10.1007/978-3-030-38156-1_3
DO - 10.1007/978-3-030-38156-1_3
M3 - Contribution to book/anthology
AN - SCOPUS:85081551578
SN - 978-3-030-38155-4
SN - 978-3-030-38158-5
T3 - Lecture Notes in Applied and Computational Mechanics
SP - 45
EP - 59
BT - Virtual Design and Validation
ER -