Details
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017 |
| Editors | D. Phillips, D. Billington |
| Pages | 245-246 |
| Number of pages | 2 |
| ISBN (electronic) | 9780995775107 |
| Publication status | Published - 30 May 2017 |
| Event | 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017 - Hannover, Germany Duration: 29 May 2017 → 2 Jun 2017 |
Publication series
| Name | Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017 |
|---|
Abstract
Micro end milling processes are not economical, as the tools are quickly worn out and their production is too cost-intensive. For this reason a batch-capable manufacturing process has been developed, enabling a simultaneous production of several thousand of silicon carbide (SiC) micro end milling tools. The manufacturing method is a combination of photolithographic structuring of a SiC-wafer and deep reactive ion etching (DRIE). The single tool heads with a height of more than 150 μm and a diameter below 30 μm are afterwards mechanically separated from the wafer and added on a shaft. Main points of this investigation are the performance of the optimized micro end mills, the tool geometry reliability and the milling surfaces quality. A systematic investigation by confo-cal scanning microscopy and scanning electron microscopy ensure a selection and characterisation of the precision geometry of the tools and micro milled structures.
Keywords
- Batch process, Mass production, Micro end mills, Silicon carbide
ASJC Scopus subject areas
- Materials Science(all)
- General Materials Science
- Engineering(all)
- Mechanical Engineering
- Physics and Astronomy(all)
- Instrumentation
- Engineering(all)
- Industrial and Manufacturing Engineering
- Environmental Science(all)
- Environmental Engineering
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Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017. ed. / D. Phillips; D. Billington. 2017. p. 245-246 (Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Mass production for micro end mills
AU - Denkena, Berend
AU - Wurz, Marc
AU - Grove, Thilo
AU - Bouabid, Abdelhamid
AU - Asadi, Esmail
PY - 2017/5/30
Y1 - 2017/5/30
N2 - Micro end milling processes are not economical, as the tools are quickly worn out and their production is too cost-intensive. For this reason a batch-capable manufacturing process has been developed, enabling a simultaneous production of several thousand of silicon carbide (SiC) micro end milling tools. The manufacturing method is a combination of photolithographic structuring of a SiC-wafer and deep reactive ion etching (DRIE). The single tool heads with a height of more than 150 μm and a diameter below 30 μm are afterwards mechanically separated from the wafer and added on a shaft. Main points of this investigation are the performance of the optimized micro end mills, the tool geometry reliability and the milling surfaces quality. A systematic investigation by confo-cal scanning microscopy and scanning electron microscopy ensure a selection and characterisation of the precision geometry of the tools and micro milled structures.
AB - Micro end milling processes are not economical, as the tools are quickly worn out and their production is too cost-intensive. For this reason a batch-capable manufacturing process has been developed, enabling a simultaneous production of several thousand of silicon carbide (SiC) micro end milling tools. The manufacturing method is a combination of photolithographic structuring of a SiC-wafer and deep reactive ion etching (DRIE). The single tool heads with a height of more than 150 μm and a diameter below 30 μm are afterwards mechanically separated from the wafer and added on a shaft. Main points of this investigation are the performance of the optimized micro end mills, the tool geometry reliability and the milling surfaces quality. A systematic investigation by confo-cal scanning microscopy and scanning electron microscopy ensure a selection and characterisation of the precision geometry of the tools and micro milled structures.
KW - Batch process
KW - Mass production
KW - Micro end mills
KW - Silicon carbide
UR - http://www.scopus.com/inward/record.url?scp=85041335313&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:85041335313
T3 - Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017
SP - 245
EP - 246
BT - Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017
A2 - Phillips, D.
A2 - Billington, D.
T2 - 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017
Y2 - 29 May 2017 through 2 June 2017
ER -