Details
| Original language | English |
|---|---|
| Title of host publication | 46th Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials |
| Subtitle of host publication | 2014 |
| Publisher | SPIE |
| ISBN (electronic) | 9781628413007 |
| Publication status | Published - 13 Nov 2014 |
| Externally published | Yes |
| Event | 46th Annual Laser Damage Symposium - Laser-Induced Damage in Optical Materials: 2014 - Boulder, United States Duration: 14 Sept 2014 → 17 Sept 2014 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Volume | 9237 |
| ISSN (Print) | 0277-786X |
| ISSN (electronic) | 1996-756X |
Abstract
In optical coating production the generation of particles and defects is always an undesirable side effect and cannot be completely avoided in the handling steps of the optical components. Particles and defects on the substrates and in the functional coatings lead to scattering and absorption, which may cause a lower damage threshold for components of high power laser application. In this study, results of a long term investigation in the quality and the state of the cleanliness of multilayer systems produced by different deposition techniques are presented. Coated samples of different coating processes are investigated with the help of a Fast Total Scatter scanning system. Adapted data reduction algorithms for the determination of the particle sizes derived from the scattering measurements are developed and applied to the measurement results. On this basis, the density distribution of particle contamination on the samples is evaluated for selected coating runs over a long term period. The calculated statistics of the samples are related to the corresponding production conditions of individual coating plants to extract specific effects of the process environment.
Keywords
- ISO 13696, Particle density distribution, Surface inspection, Total scattering
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
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- BibTeX
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46th Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials: 2014. SPIE, 2014. 923708 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9237).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Mapping of total scattering as a tool for long term investigations in the cleaning state of the functional coated samples
AU - Kadkhoda, P.
AU - Günster, S.
AU - Jensen, L.
AU - Ristau, Detlev
PY - 2014/11/13
Y1 - 2014/11/13
N2 - In optical coating production the generation of particles and defects is always an undesirable side effect and cannot be completely avoided in the handling steps of the optical components. Particles and defects on the substrates and in the functional coatings lead to scattering and absorption, which may cause a lower damage threshold for components of high power laser application. In this study, results of a long term investigation in the quality and the state of the cleanliness of multilayer systems produced by different deposition techniques are presented. Coated samples of different coating processes are investigated with the help of a Fast Total Scatter scanning system. Adapted data reduction algorithms for the determination of the particle sizes derived from the scattering measurements are developed and applied to the measurement results. On this basis, the density distribution of particle contamination on the samples is evaluated for selected coating runs over a long term period. The calculated statistics of the samples are related to the corresponding production conditions of individual coating plants to extract specific effects of the process environment.
AB - In optical coating production the generation of particles and defects is always an undesirable side effect and cannot be completely avoided in the handling steps of the optical components. Particles and defects on the substrates and in the functional coatings lead to scattering and absorption, which may cause a lower damage threshold for components of high power laser application. In this study, results of a long term investigation in the quality and the state of the cleanliness of multilayer systems produced by different deposition techniques are presented. Coated samples of different coating processes are investigated with the help of a Fast Total Scatter scanning system. Adapted data reduction algorithms for the determination of the particle sizes derived from the scattering measurements are developed and applied to the measurement results. On this basis, the density distribution of particle contamination on the samples is evaluated for selected coating runs over a long term period. The calculated statistics of the samples are related to the corresponding production conditions of individual coating plants to extract specific effects of the process environment.
KW - ISO 13696
KW - Particle density distribution
KW - Surface inspection
KW - Total scattering
UR - http://www.scopus.com/inward/record.url?scp=84923012732&partnerID=8YFLogxK
U2 - 10.1117/12.2069226
DO - 10.1117/12.2069226
M3 - Conference contribution
AN - SCOPUS:84923012732
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - 46th Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials
PB - SPIE
T2 - 46th Annual Laser Damage Symposium - Laser-Induced Damage in Optical Materials: 2014
Y2 - 14 September 2014 through 17 September 2014
ER -