Details
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the 16th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2016 |
| Editors | P. Bointon, Richard Leach, N. Southon |
| ISBN (electronic) | 9780956679086 |
| Publication status | Published - 1 Jun 2016 |
| Event | 16th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2016 - Nottingham, United Kingdom (UK) Duration: 30 May 2016 → 3 Jun 2016 |
Publication series
| Name | Proceedings of the 16th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2016 |
|---|
Abstract
In the fields of micro system technology, medical engineering and biotechnology the use of components with filigree structures becomes an increasingly issue. The manufacturing of such components is realized by e.g. micro milling tools. The micro end mills have been produced individually and therefore incur higher manufacturing costs. The batch production is an approach to increase cost-efficiency of the micro milling processes by simultaneous manufacturing of several tools. In this paper a new manufacturing method of silicon carbide (SiC) micro end milling tools is presented and the performance is investigated. The experiments will show which aspects by the manufacturing process have to be considered to achieve a higher performance of the tools.
Keywords
- Batch process, Dry etching, Micro end milling tools, Micromachining, Silicon carbide
ASJC Scopus subject areas
- Materials Science(all)
- General Materials Science
- Environmental Science(all)
- Environmental Engineering
- Engineering(all)
- Mechanical Engineering
- Engineering(all)
- Industrial and Manufacturing Engineering
- Physics and Astronomy(all)
- Instrumentation
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Proceedings of the 16th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2016. ed. / P. Bointon; Richard Leach; N. Southon. 2016. (Proceedings of the 16th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2016).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Manufacturing of micro end mills by batch processing of silicon carbide
AU - Denkena, Berend
AU - Wurz, Marc
AU - Grove, Thilo
AU - Bouabid, Abdelhamid
AU - Asadi, Esmail
PY - 2016/6/1
Y1 - 2016/6/1
N2 - In the fields of micro system technology, medical engineering and biotechnology the use of components with filigree structures becomes an increasingly issue. The manufacturing of such components is realized by e.g. micro milling tools. The micro end mills have been produced individually and therefore incur higher manufacturing costs. The batch production is an approach to increase cost-efficiency of the micro milling processes by simultaneous manufacturing of several tools. In this paper a new manufacturing method of silicon carbide (SiC) micro end milling tools is presented and the performance is investigated. The experiments will show which aspects by the manufacturing process have to be considered to achieve a higher performance of the tools.
AB - In the fields of micro system technology, medical engineering and biotechnology the use of components with filigree structures becomes an increasingly issue. The manufacturing of such components is realized by e.g. micro milling tools. The micro end mills have been produced individually and therefore incur higher manufacturing costs. The batch production is an approach to increase cost-efficiency of the micro milling processes by simultaneous manufacturing of several tools. In this paper a new manufacturing method of silicon carbide (SiC) micro end milling tools is presented and the performance is investigated. The experiments will show which aspects by the manufacturing process have to be considered to achieve a higher performance of the tools.
KW - Batch process
KW - Dry etching
KW - Micro end milling tools
KW - Micromachining
KW - Silicon carbide
UR - http://www.scopus.com/inward/record.url?scp=84984662572&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84984662572
T3 - Proceedings of the 16th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2016
BT - Proceedings of the 16th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2016
A2 - Bointon, P.
A2 - Leach, Richard
A2 - Southon, N.
T2 - 16th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2016
Y2 - 30 May 2016 through 3 June 2016
ER -