Details
| Original language | English |
|---|---|
| Pages (from-to) | 15825-15835 |
| Number of pages | 11 |
| Journal | Optics express |
| Volume | 31 |
| Issue number | 10 |
| Publication status | Published - 26 Apr 2023 |
Abstract
Quantized nanolaminates are a type of optical metamaterials, which were discovered only recently. Their feasibility was demonstrated by atomic layer deposition and ion beam sputtering so far. In this paper, we will report on the successful magnetron sputter deposition of quantized nanolaminates based on Ta2O5-SiO2. We will describe the deposition process, show results and material characterization of films deposited in a very wide parameter range. Furthermore, we will show how quantized nanolaminates deposited by magnetron sputtering were used in optical interference coatings such as antireflection and mirror coatings.
ASJC Scopus subject areas
- Physics and Astronomy(all)
- Atomic and Molecular Physics, and Optics
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In: Optics express, Vol. 31, No. 10, 26.04.2023, p. 15825-15835.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - Magnetron sputter deposition of Ta2O5-SiO2 quantized nanolaminates
AU - Schwyn Thöny, S.
AU - Bärtschi, M.
AU - Batzer, M.
AU - Baselgia, M.
AU - Waldner, S.
AU - Steinecke, M.
AU - Badorreck, H.
AU - Wienke, A.
AU - Jupé, M.
N1 - Funding Information: Innosuisse - Schweizerische Agentur für Innovationsförderung (Project 39986.1 IP-ENG); Allianz Industrie Forschung (QuantUV (21364 N)); Deutsche Forschungsgemeinschaft (Cluster of Excellence PhoenixD (390833453, EXC 2122)). The authors thank Innosuisse - Swiss Innovation Agency and the Deutsche Forschungsgemeinschaft (DFG, German Research Foundation) for funding under Germany’s Excellence Strategy within the Cluster of Excellence PhoenixD (EXC 2122, project ID 390833453).
PY - 2023/4/26
Y1 - 2023/4/26
N2 - Quantized nanolaminates are a type of optical metamaterials, which were discovered only recently. Their feasibility was demonstrated by atomic layer deposition and ion beam sputtering so far. In this paper, we will report on the successful magnetron sputter deposition of quantized nanolaminates based on Ta2O5-SiO2. We will describe the deposition process, show results and material characterization of films deposited in a very wide parameter range. Furthermore, we will show how quantized nanolaminates deposited by magnetron sputtering were used in optical interference coatings such as antireflection and mirror coatings.
AB - Quantized nanolaminates are a type of optical metamaterials, which were discovered only recently. Their feasibility was demonstrated by atomic layer deposition and ion beam sputtering so far. In this paper, we will report on the successful magnetron sputter deposition of quantized nanolaminates based on Ta2O5-SiO2. We will describe the deposition process, show results and material characterization of films deposited in a very wide parameter range. Furthermore, we will show how quantized nanolaminates deposited by magnetron sputtering were used in optical interference coatings such as antireflection and mirror coatings.
UR - http://www.scopus.com/inward/record.url?scp=85158115676&partnerID=8YFLogxK
U2 - 10.1364/OE.487892
DO - 10.1364/OE.487892
M3 - Article
C2 - 37157674
AN - SCOPUS:85158115676
VL - 31
SP - 15825
EP - 15835
JO - Optics express
JF - Optics express
SN - 1094-4087
IS - 10
ER -