Magnetic MEMS

Research output: Chapter in book/report/conference proceedingConference contributionResearch

Authors

  • Marc Wurz
  • Lutz Rissing
  • Alexander Belski
  • Tim Griesbach
  • Matthias Kaiser
  • Anja Wienecke
View graph of relations

Details

Original languageGerman
Title of host publicationSt. Petersburg State Polytechnical University Journal 5
Pages21-35
Edition205
Publication statusPublished - 2014
EventSemicon Russia 2014 - St. Petersburg, Russian Federation
Duration: 14 May 201415 May 2014

Cite this

Magnetic MEMS. / Wurz, Marc; Rissing, Lutz; Belski, Alexander et al.
St. Petersburg State Polytechnical University Journal 5. 205. ed. 2014. p. 21-35.

Research output: Chapter in book/report/conference proceedingConference contributionResearch

Wurz, M, Rissing, L, Belski, A, Griesbach, T, Kaiser, M & Wienecke, A 2014, Magnetic MEMS. in St. Petersburg State Polytechnical University Journal 5. 205 edn, pp. 21-35, Semicon Russia 2014, Russian Federation, 14 May 2014.
Wurz, M., Rissing, L., Belski, A., Griesbach, T., Kaiser, M., & Wienecke, A. (2014). Magnetic MEMS. In St. Petersburg State Polytechnical University Journal 5 (205 ed., pp. 21-35)
Wurz M, Rissing L, Belski A, Griesbach T, Kaiser M, Wienecke A. Magnetic MEMS. In St. Petersburg State Polytechnical University Journal 5. 205 ed. 2014. p. 21-35
Wurz, Marc ; Rissing, Lutz ; Belski, Alexander et al. / Magnetic MEMS. St. Petersburg State Polytechnical University Journal 5. 205. ed. 2014. pp. 21-35
Download
@inproceedings{c7efbd5408494961b623548d44b4345f,
title = "Magnetic MEMS",
author = "Marc Wurz and Lutz Rissing and Alexander Belski and Tim Griesbach and Matthias Kaiser and Anja Wienecke",
year = "2014",
language = "Deutsch",
pages = "21--35",
booktitle = "St. Petersburg State Polytechnical University Journal 5",
edition = "205",
note = "Semicon Russia 2014 ; Conference date: 14-05-2014 Through 15-05-2014",

}

Download

TY - GEN

T1 - Magnetic MEMS

AU - Wurz, Marc

AU - Rissing, Lutz

AU - Belski, Alexander

AU - Griesbach, Tim

AU - Kaiser, Matthias

AU - Wienecke, Anja

PY - 2014

Y1 - 2014

M3 - Aufsatz in Konferenzband

SP - 21

EP - 35

BT - St. Petersburg State Polytechnical University Journal 5

T2 - Semicon Russia 2014

Y2 - 14 May 2014 through 15 May 2014

ER -

By the same author(s)