Details
Original language | German |
---|---|
Title of host publication | St. Petersburg State Polytechnical University Journal 5 |
Pages | 21-35 |
Edition | 205 |
Publication status | Published - 2014 |
Event | Semicon Russia 2014 - St. Petersburg, Russian Federation Duration: 14 May 2014 → 15 May 2014 |
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St. Petersburg State Polytechnical University Journal 5. 205. ed. 2014. p. 21-35.
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research
}
TY - GEN
T1 - Magnetic MEMS
AU - Wurz, Marc
AU - Rissing, Lutz
AU - Belski, Alexander
AU - Griesbach, Tim
AU - Kaiser, Matthias
AU - Wienecke, Anja
PY - 2014
Y1 - 2014
M3 - Aufsatz in Konferenzband
SP - 21
EP - 35
BT - St. Petersburg State Polytechnical University Journal 5
T2 - Semicon Russia 2014
Y2 - 14 May 2014 through 15 May 2014
ER -