Details
| Original language | English |
|---|---|
| Pages (from-to) | 1909-1916 |
| Number of pages | 8 |
| Journal | Microsystem Technologies |
| Volume | 14 |
| Issue number | 12 |
| Early online date | 18 Mar 2008 |
| Publication status | Published - Nov 2008 |
Abstract
An increasing trend towards miniaturization of mechanical components necessitates the further development of micro-machining techniques in order to produce components within given tolerances. For the dressing of multilayered, metallically bonded, fine-grained grinding wheels that are used for micro-grinding the technique of electro contact discharge dressing was developed. In the following, the determined interrelations between the variables dressing voltage, limitation of dressing current, infeed and feed of electrode, and the volume flow rate in conditioning as well as the quality factor in conditioning are presented and illustrated. Thanks to the development of new geometries of CVD-diamond micro-grinding-pencils, a reduction of edge disruptions as well as a reduction of tool diameters to a minimum of 250 μm for the machining of brittle materials could be achieved. For the micro-drilling of ductile materials the maximal drilling depth could be increased by means of an adjusted process control. The smallest examined drill diameter was 50 μm. The utilizability of the developed processes and tools was proven in the production of aerostatic micro-bearings in the scope of the collaborative research center (SFB) 516.
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Hardware and Architecture
- Engineering(all)
- Electrical and Electronic Engineering
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In: Microsystem Technologies, Vol. 14, No. 12, 11.2008, p. 1909-1916.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - Machining of micro-systems
AU - Denkena, Berend
AU - Hoffmeister, Hans Werner
AU - Hahmann, Dennis
AU - Hlavac, Marcus
PY - 2008/11
Y1 - 2008/11
N2 - An increasing trend towards miniaturization of mechanical components necessitates the further development of micro-machining techniques in order to produce components within given tolerances. For the dressing of multilayered, metallically bonded, fine-grained grinding wheels that are used for micro-grinding the technique of electro contact discharge dressing was developed. In the following, the determined interrelations between the variables dressing voltage, limitation of dressing current, infeed and feed of electrode, and the volume flow rate in conditioning as well as the quality factor in conditioning are presented and illustrated. Thanks to the development of new geometries of CVD-diamond micro-grinding-pencils, a reduction of edge disruptions as well as a reduction of tool diameters to a minimum of 250 μm for the machining of brittle materials could be achieved. For the micro-drilling of ductile materials the maximal drilling depth could be increased by means of an adjusted process control. The smallest examined drill diameter was 50 μm. The utilizability of the developed processes and tools was proven in the production of aerostatic micro-bearings in the scope of the collaborative research center (SFB) 516.
AB - An increasing trend towards miniaturization of mechanical components necessitates the further development of micro-machining techniques in order to produce components within given tolerances. For the dressing of multilayered, metallically bonded, fine-grained grinding wheels that are used for micro-grinding the technique of electro contact discharge dressing was developed. In the following, the determined interrelations between the variables dressing voltage, limitation of dressing current, infeed and feed of electrode, and the volume flow rate in conditioning as well as the quality factor in conditioning are presented and illustrated. Thanks to the development of new geometries of CVD-diamond micro-grinding-pencils, a reduction of edge disruptions as well as a reduction of tool diameters to a minimum of 250 μm for the machining of brittle materials could be achieved. For the micro-drilling of ductile materials the maximal drilling depth could be increased by means of an adjusted process control. The smallest examined drill diameter was 50 μm. The utilizability of the developed processes and tools was proven in the production of aerostatic micro-bearings in the scope of the collaborative research center (SFB) 516.
UR - http://www.scopus.com/inward/record.url?scp=51849095003&partnerID=8YFLogxK
U2 - 10.1007/s00542-008-0610-7
DO - 10.1007/s00542-008-0610-7
M3 - Article
AN - SCOPUS:51849095003
VL - 14
SP - 1909
EP - 1916
JO - Microsystem Technologies
JF - Microsystem Technologies
SN - 0946-7076
IS - 12
ER -