Details
| Original language | English |
|---|---|
| Article number | 58700J |
| Pages (from-to) | 1-8 |
| Number of pages | 8 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 5870 |
| Publication status | Published - 19 Aug 2005 |
| Event | Advances in Thin-Film Coatings for Optical Applications II - San Diego, CA, United States Duration: 1 Aug 2005 → 2 Aug 2005 |
Abstract
By combining electron beam lithography with coating processes, very shallow gratings with diffraction efficiencies between 0.02% and 7% have been realized. Advantages and disadvantages of different layout concepts for such gratings, their fabrication regime and measurements of their scattering will be discussed. The application of such gratings as coupling components to a reflective Fabry-Perot cavity resulted in a finesse of more than 400.
Keywords
- Beam splitters, Diffraction gratings, Gravitational wave detection, Interferometry
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
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In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 5870, 58700J, 19.08.2005, p. 1-8.
Research output: Contribution to journal › Conference article › Research › peer review
}
TY - JOUR
T1 - Low-loss gratings for next-generation gravitational wave detectors
AU - Clausnitzer, T.
AU - Kley, E. B.
AU - Tünnermann, A.
AU - Bunkowski, A.
AU - Burmeister, O.
AU - Danzmann, K.
AU - Schnabel, R.
AU - Duparré, A.
AU - Gliech, S.
PY - 2005/8/19
Y1 - 2005/8/19
N2 - By combining electron beam lithography with coating processes, very shallow gratings with diffraction efficiencies between 0.02% and 7% have been realized. Advantages and disadvantages of different layout concepts for such gratings, their fabrication regime and measurements of their scattering will be discussed. The application of such gratings as coupling components to a reflective Fabry-Perot cavity resulted in a finesse of more than 400.
AB - By combining electron beam lithography with coating processes, very shallow gratings with diffraction efficiencies between 0.02% and 7% have been realized. Advantages and disadvantages of different layout concepts for such gratings, their fabrication regime and measurements of their scattering will be discussed. The application of such gratings as coupling components to a reflective Fabry-Perot cavity resulted in a finesse of more than 400.
KW - Beam splitters
KW - Diffraction gratings
KW - Gravitational wave detection
KW - Interferometry
UR - http://www.scopus.com/inward/record.url?scp=29144443903&partnerID=8YFLogxK
U2 - 10.1117/12.617334
DO - 10.1117/12.617334
M3 - Conference article
AN - SCOPUS:29144443903
VL - 5870
SP - 1
EP - 8
JO - Proceedings of SPIE - The International Society for Optical Engineering
JF - Proceedings of SPIE - The International Society for Optical Engineering
SN - 0277-786X
M1 - 58700J
T2 - Advances in Thin-Film Coatings for Optical Applications II
Y2 - 1 August 2005 through 2 August 2005
ER -