Details
| Original language | English |
|---|---|
| Title of host publication | The European Conference on Lasers and Electro-Optics, CLEO_Europe_2019 |
| Publisher | OSA - The Optical Society |
| Number of pages | 1 |
| ISBN (print) | 9781728104690 |
| Publication status | Published - 2019 |
| Event | The European Conference on Lasers and Electro-Optics, CLEO_Europe_2019 - Munich, Germany Duration: 23 Jun 2019 → 27 Jun 2019 |
Publication series
| Name | Optics InfoBase Conference Papers |
|---|---|
| Volume | Part F140-CLEO_Europe 2019 |
| ISSN (electronic) | 2162-2701 |
Abstract
Fabrication of desired micro structures in polymers is always of keen interest for applications in illumination optics, sensors and optical interconnects. The challenge is to fabricate structures in the sub-micron range but at low cost. Among other fabrication methods as described in [1], maskless lithography tends to be cost effective and can create sub-micron structures.
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Engineering(all)
- Mechanics of Materials
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The European Conference on Lasers and Electro-Optics, CLEO_Europe_2019. OSA - The Optical Society, 2019. 2019-ce_10_6 (Optics InfoBase Conference Papers; Vol. Part F140-CLEO_Europe 2019).
Research output: Chapter in book/report/conference proceeding › Conference abstract › Research › peer review
}
TY - CHAP
T1 - Low-cost fabrication of polymer based micro-optical devices for application in illumination, sensing, and optical interconnects
AU - Khan, Muhammad Shaukat
AU - Rahlves, Maik
AU - Lachmayer, Roland
AU - Roth, Bernhard
N1 - © 2019 IEEE
PY - 2019
Y1 - 2019
N2 - Fabrication of desired micro structures in polymers is always of keen interest for applications in illumination optics, sensors and optical interconnects. The challenge is to fabricate structures in the sub-micron range but at low cost. Among other fabrication methods as described in [1], maskless lithography tends to be cost effective and can create sub-micron structures.
AB - Fabrication of desired micro structures in polymers is always of keen interest for applications in illumination optics, sensors and optical interconnects. The challenge is to fabricate structures in the sub-micron range but at low cost. Among other fabrication methods as described in [1], maskless lithography tends to be cost effective and can create sub-micron structures.
UR - http://www.scopus.com/inward/record.url?scp=85084586529&partnerID=8YFLogxK
M3 - Conference abstract
SN - 9781728104690
T3 - Optics InfoBase Conference Papers
BT - The European Conference on Lasers and Electro-Optics, CLEO_Europe_2019
PB - OSA - The Optical Society
T2 - The European Conference on Lasers and Electro-Optics, CLEO_Europe_2019
Y2 - 23 June 2019 through 27 June 2019
ER -