Details
| Original language | English |
|---|---|
| Title of host publication | XVII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers |
| Publication status | Published - 21 Apr 2009 |
| Externally published | Yes |
| Event | XVII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers - Lisboa, Portugal Duration: 15 Sept 2008 → 19 Sept 2008 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Volume | 7131 |
| ISSN (Print) | 0277-786X |
Abstract
The aim of this work is the optimization of the resonator optics of excimer laser systems to achieve longer lifetimes and to reduce the cost of ownership. The degradation after long-term exposure to high photon fluxes (typically 80 mJ/cm2) at the ArF laser wavelength of 193 nm was analyzed. Based on the investigations, a model describing the process of the deterioration of the out-coupling partial reflector was developed. It was found that contamination of the optics by the laser's discharge electrodes leads to absorption losses on the surface facing the inside of the resonator. As a consequence, the laser irradiation causes a temperature gradient in the CaF2-substrates which leads to crystal cleavage and braking of the optics. Defects on the outward surface are the origin for the growth of Calcite crystals and organic compounds by photo induced chemical reactions of the substrate material and contaminations in the purge gas. It was demonstrated that the lifetime of the resonator optics can be substantially increased by adapted optical designs and coatings.
Keywords
- ArF laser, Degradation, Optical coatings, Partial reflector, Resonator optics, Substrate
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
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- BibTeX
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XVII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers. 2009. 713117 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 7131).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Long term tests of resonator optics in ArF excimer lasers
AU - Beermann, Nils
AU - Blaschke, Holger
AU - Ehlers, Henrik
AU - Ristau, Detlev
AU - Molder, Dirk Wulff
AU - Jukresch, Sigrid
AU - Matern, Ansgar
AU - Bischoff, Martin
AU - Gäbler, Dieter
AU - Kaiser, Norbert
PY - 2009/4/21
Y1 - 2009/4/21
N2 - The aim of this work is the optimization of the resonator optics of excimer laser systems to achieve longer lifetimes and to reduce the cost of ownership. The degradation after long-term exposure to high photon fluxes (typically 80 mJ/cm2) at the ArF laser wavelength of 193 nm was analyzed. Based on the investigations, a model describing the process of the deterioration of the out-coupling partial reflector was developed. It was found that contamination of the optics by the laser's discharge electrodes leads to absorption losses on the surface facing the inside of the resonator. As a consequence, the laser irradiation causes a temperature gradient in the CaF2-substrates which leads to crystal cleavage and braking of the optics. Defects on the outward surface are the origin for the growth of Calcite crystals and organic compounds by photo induced chemical reactions of the substrate material and contaminations in the purge gas. It was demonstrated that the lifetime of the resonator optics can be substantially increased by adapted optical designs and coatings.
AB - The aim of this work is the optimization of the resonator optics of excimer laser systems to achieve longer lifetimes and to reduce the cost of ownership. The degradation after long-term exposure to high photon fluxes (typically 80 mJ/cm2) at the ArF laser wavelength of 193 nm was analyzed. Based on the investigations, a model describing the process of the deterioration of the out-coupling partial reflector was developed. It was found that contamination of the optics by the laser's discharge electrodes leads to absorption losses on the surface facing the inside of the resonator. As a consequence, the laser irradiation causes a temperature gradient in the CaF2-substrates which leads to crystal cleavage and braking of the optics. Defects on the outward surface are the origin for the growth of Calcite crystals and organic compounds by photo induced chemical reactions of the substrate material and contaminations in the purge gas. It was demonstrated that the lifetime of the resonator optics can be substantially increased by adapted optical designs and coatings.
KW - ArF laser
KW - Degradation
KW - Optical coatings
KW - Partial reflector
KW - Resonator optics
KW - Substrate
UR - http://www.scopus.com/inward/record.url?scp=69849092714&partnerID=8YFLogxK
U2 - 10.1117/12.816706
DO - 10.1117/12.816706
M3 - Conference contribution
AN - SCOPUS:69849092714
SN - 9780819473653
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - XVII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers
T2 - XVII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers
Y2 - 15 September 2008 through 19 September 2008
ER -