Details
| Original language | English |
|---|---|
| Title of host publication | 50th Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials 2018 |
| Publisher | SPIE |
| ISBN (electronic) | 9781510621930 |
| Publication status | Published - 16 Nov 2018 |
| Event | 50th Annual Laser Damage Symposium - Laser-Induced Damage in Optical Materials 2018 - Boulder, United States Duration: 23 Sept 2018 → 26 Sept 2018 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Volume | 10805 |
| ISSN (Print) | 0277-786X |
| ISSN (electronic) | 1996-756X |
Abstract
Previous studies have shown that nanometer scale defects can lead to the formation of submicrometer craters, if located in coatings with a relatively small thickness. Due to the small size, such damages are challenging to detect in the online and offline damage detection and may therefore lead to an overestimation of the LIDT for the tested optical component. However, the influence of these nanopits on the optical properties and the impact on the initiation of catastrophic damage was not investigated in detail in the past. In order to study the correlation between nanopits, optical properties and catastrophic damage, samples with an AR-coating were fabricated by means of ion beam sputtering (IBS) and tested for their laser resistance by LIDT raster scans in the nanosecond regime at 355 nm. The generation and morphology changes of the nanopits were monitored for different pulse numbers and in dependence of the starting fluence. In addition to the inspection with an optical microscope in differential interference contrast (DIC) mode as prescribed by ISO 21254, alternative inspection methods, for example, dark field microscopy and scanning electron microscopy (SEM), were used to detect the nanopits. The damage test revealed that nanopits occur rarely in standard AR-coatings and possess only a small relevance for the LIDT. The typical damage morphology observed consisted of micrometer-sized pits which exhibited a stable size over a large fluence range and no growth after repeated irradiation.
Keywords
- Catastrophic damage, Defect-induced laser damage, Nanosecond time scale, Pit formation
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
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- BibTeX
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50th Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials 2018. SPIE, 2018. 108051N (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 10805).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Laser-induced pit formation in UV-Antireflective coatings
AU - Paschel, Sebastian
AU - Balasa, Istvan
AU - Jensen, Lars O.
AU - Cheng, X.
AU - Wang, Z.
AU - Ristau, Detlev
N1 - Funding information: This work is part of the joint research project “Visualization of Nanometer Scale Defects Responsible for Optical Loss and Laser Induced Breakdown in Binary Coating Materials for the UV Spectral Region” ?GZ 1275) with the Tongji University and is funded by the Sino-German Center for Research Promotion. The funding by the Deutsche Forschungsgemeinschaft (DFG, German Research Foundation) – 317442515 and the National Natural Science Foundation of China (NSFC) is highly acknowledged.
PY - 2018/11/16
Y1 - 2018/11/16
N2 - Previous studies have shown that nanometer scale defects can lead to the formation of submicrometer craters, if located in coatings with a relatively small thickness. Due to the small size, such damages are challenging to detect in the online and offline damage detection and may therefore lead to an overestimation of the LIDT for the tested optical component. However, the influence of these nanopits on the optical properties and the impact on the initiation of catastrophic damage was not investigated in detail in the past. In order to study the correlation between nanopits, optical properties and catastrophic damage, samples with an AR-coating were fabricated by means of ion beam sputtering (IBS) and tested for their laser resistance by LIDT raster scans in the nanosecond regime at 355 nm. The generation and morphology changes of the nanopits were monitored for different pulse numbers and in dependence of the starting fluence. In addition to the inspection with an optical microscope in differential interference contrast (DIC) mode as prescribed by ISO 21254, alternative inspection methods, for example, dark field microscopy and scanning electron microscopy (SEM), were used to detect the nanopits. The damage test revealed that nanopits occur rarely in standard AR-coatings and possess only a small relevance for the LIDT. The typical damage morphology observed consisted of micrometer-sized pits which exhibited a stable size over a large fluence range and no growth after repeated irradiation.
AB - Previous studies have shown that nanometer scale defects can lead to the formation of submicrometer craters, if located in coatings with a relatively small thickness. Due to the small size, such damages are challenging to detect in the online and offline damage detection and may therefore lead to an overestimation of the LIDT for the tested optical component. However, the influence of these nanopits on the optical properties and the impact on the initiation of catastrophic damage was not investigated in detail in the past. In order to study the correlation between nanopits, optical properties and catastrophic damage, samples with an AR-coating were fabricated by means of ion beam sputtering (IBS) and tested for their laser resistance by LIDT raster scans in the nanosecond regime at 355 nm. The generation and morphology changes of the nanopits were monitored for different pulse numbers and in dependence of the starting fluence. In addition to the inspection with an optical microscope in differential interference contrast (DIC) mode as prescribed by ISO 21254, alternative inspection methods, for example, dark field microscopy and scanning electron microscopy (SEM), were used to detect the nanopits. The damage test revealed that nanopits occur rarely in standard AR-coatings and possess only a small relevance for the LIDT. The typical damage morphology observed consisted of micrometer-sized pits which exhibited a stable size over a large fluence range and no growth after repeated irradiation.
KW - Catastrophic damage
KW - Defect-induced laser damage
KW - Nanosecond time scale
KW - Pit formation
UR - http://www.scopus.com/inward/record.url?scp=85061045616&partnerID=8YFLogxK
U2 - 10.1117/12.2500338
DO - 10.1117/12.2500338
M3 - Conference contribution
AN - SCOPUS:85061045616
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - 50th Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials 2018
PB - SPIE
T2 - 50th Annual Laser Damage Symposium - Laser-Induced Damage in Optical Materials 2018
Y2 - 23 September 2018 through 26 September 2018
ER -