Laser processing of sub-wavelength structures on sapphire and alumina for millimeter wavelength broadband anti-reflection coatings

Research output: Contribution to journalArticleResearchpeer review

Authors

  • Viktor Schütz
  • Karl Young
  • Tomotake Matsumura
  • Shaul Hanany
  • Jürgen Koch
  • Oliver Suttmann
  • Ludger Overmeyer
  • Qi Wen

External Research Organisations

  • Laser Zentrum Hannover e.V. (LZH)
  • University of Minnesota
  • Japan Aerospace Exploration Agency
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Details

Original languageEnglish
Pages (from-to)204-209
Number of pages6
JournalJournal of Laser Micro Nanoengineering
Volume11
Issue number2
Publication statusPublished - 2016
Externally publishedYes

Abstract

Alumina, sapphire and silicon optical elements are used for the detection of cosmic microwave background radiation with its peak intensity between 0.5 and 10 mm. The reflectivity of such material is high but can be reduced with sub-wavelength structures acting as an anti-reflective coating. Required structure height of over 1 mm can be produced by laser machining. Using ultra-short laser pulses we machined > 1 mm high pyramidal structures on sapphire and alumina. The laser process has been optimized to achieve high area structuring speeds for 1 mm high structures, up to 425 mm2/h. The structured surfaces have been analysed with secondary-electron microscopy, optical confocal microscopy, and transmission spectroscopy in the 100 GHz range and provide an antireflection coating for optical elements in the millimeter wave-length.

Keywords

    Alumina, Anti-reflection, Cosmic-microwave background, Sapphire, Ultra short pulsed laser processing

ASJC Scopus subject areas

Cite this

Laser processing of sub-wavelength structures on sapphire and alumina for millimeter wavelength broadband anti-reflection coatings. / Schütz, Viktor; Young, Karl; Matsumura, Tomotake et al.
In: Journal of Laser Micro Nanoengineering, Vol. 11, No. 2, 2016, p. 204-209.

Research output: Contribution to journalArticleResearchpeer review

Schütz V, Young K, Matsumura T, Hanany S, Koch J, Suttmann O et al. Laser processing of sub-wavelength structures on sapphire and alumina for millimeter wavelength broadband anti-reflection coatings. Journal of Laser Micro Nanoengineering. 2016;11(2):204-209. doi: 10.2961/jlmn.2016.02.0011
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abstract = "Alumina, sapphire and silicon optical elements are used for the detection of cosmic microwave background radiation with its peak intensity between 0.5 and 10 mm. The reflectivity of such material is high but can be reduced with sub-wavelength structures acting as an anti-reflective coating. Required structure height of over 1 mm can be produced by laser machining. Using ultra-short laser pulses we machined > 1 mm high pyramidal structures on sapphire and alumina. The laser process has been optimized to achieve high area structuring speeds for 1 mm high structures, up to 425 mm2/h. The structured surfaces have been analysed with secondary-electron microscopy, optical confocal microscopy, and transmission spectroscopy in the 100 GHz range and provide an antireflection coating for optical elements in the millimeter wave-length.",
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AU - Schütz, Viktor

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AU - Matsumura, Tomotake

AU - Hanany, Shaul

AU - Koch, Jürgen

AU - Suttmann, Oliver

AU - Overmeyer, Ludger

AU - Wen, Qi

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