Details
| Original language | English |
|---|---|
| Pages (from-to) | 215-218 |
| Number of pages | 4 |
| Journal | CIRP Annals - Manufacturing Technology |
| Volume | 61 |
| Issue number | 1 |
| Publication status | Published - 17 Apr 2012 |
| Externally published | Yes |
Abstract
Thin film strain sensors applied directly on machine components provide high reliability. However, sensors patterned by standard photolithographic processes are limited to planar surfaces. To overcome these limitations we developed a 3-D capable direct patterning process for NiCr thin film sensors based on ultrafast lasers and galvanometer scanners. Our investigations showed that strain sensors with spatial resolution of 30 μm can be patterned on 3-D shaped machine tool components even at extremely tilted surfaces (up to 70°). First machining results and sensor tests indicate that laser thin film patterning enables efficient and automatable production of novel sensor concepts, e.g. for automotive, medical and machine tool applications.
Keywords
- Laser micro machining, Sensor, Thin film processing
ASJC Scopus subject areas
- Engineering(all)
- Mechanical Engineering
- Engineering(all)
- Industrial and Manufacturing Engineering
Cite this
- Standard
- Harvard
- Apa
- Vancouver
- BibTeX
- RIS
In: CIRP Annals - Manufacturing Technology, Vol. 61, No. 1, 17.04.2012, p. 215-218.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - Laser patterning of thin film sensors on 3-D surfaces
AU - Overmeyer, Ludger
AU - Duesing, Jan Friedrich
AU - Suttmann, Oliver
AU - Stute, Uwe
N1 - Funding information: The authors thank Dr. K.M. Litwinski from IFW Hannover for preparing tension samples and H. Gerdes from Fraunhofer IST, Braunschweig, for sputter coating of the samples. This work was supported by German Research Foundation (DFG) within the Collaborative Research Centre CRC 653, “Gentelligent Components in their Lifecycle”.
PY - 2012/4/17
Y1 - 2012/4/17
N2 - Thin film strain sensors applied directly on machine components provide high reliability. However, sensors patterned by standard photolithographic processes are limited to planar surfaces. To overcome these limitations we developed a 3-D capable direct patterning process for NiCr thin film sensors based on ultrafast lasers and galvanometer scanners. Our investigations showed that strain sensors with spatial resolution of 30 μm can be patterned on 3-D shaped machine tool components even at extremely tilted surfaces (up to 70°). First machining results and sensor tests indicate that laser thin film patterning enables efficient and automatable production of novel sensor concepts, e.g. for automotive, medical and machine tool applications.
AB - Thin film strain sensors applied directly on machine components provide high reliability. However, sensors patterned by standard photolithographic processes are limited to planar surfaces. To overcome these limitations we developed a 3-D capable direct patterning process for NiCr thin film sensors based on ultrafast lasers and galvanometer scanners. Our investigations showed that strain sensors with spatial resolution of 30 μm can be patterned on 3-D shaped machine tool components even at extremely tilted surfaces (up to 70°). First machining results and sensor tests indicate that laser thin film patterning enables efficient and automatable production of novel sensor concepts, e.g. for automotive, medical and machine tool applications.
KW - Laser micro machining
KW - Sensor
KW - Thin film processing
UR - http://www.scopus.com/inward/record.url?scp=84861647752&partnerID=8YFLogxK
U2 - 10.1016/j.cirp.2012.03.087
DO - 10.1016/j.cirp.2012.03.087
M3 - Article
AN - SCOPUS:84861647752
VL - 61
SP - 215
EP - 218
JO - CIRP Annals - Manufacturing Technology
JF - CIRP Annals - Manufacturing Technology
SN - 0007-8506
IS - 1
ER -