Laser damage studies on MgF2 thin films

Research output: Contribution to journal › Article › Research › peer review

Authors

  • Maria Lucia Protopapa
  • Ferdinando De Tomasi
  • Maria Rita Perrone
  • Angela Piegari
  • Enrico Masetti
  • Detlev Ristau
  • Etienne Quesnel
  • Angela Duparré

External Research Organisations

  • Instituto Nazionale per la Fisica della Materia
  • Ente Per Le Nuove Tecnologie L'energia e l'ambiente
  • Laser Zentrum Hannover e.V. (LZH)
  • French Alternative Energies and Atomic Energy Commission (CEA)
  • Fraunhofer Institute for Applied Optics and Precision Engineering (IOF)
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Details

Original languageEnglish
Pages (from-to)681-688
Number of pages8
JournalJournal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
Volume19
Issue number2
Publication statusPublished - 12 Mar 2001
Externally publishedYes

Abstract

A 248 nm KrF excimer laser was used to study the damage on MgF2 thin films deposited on fused silica and CaF2 substrates. The photoacoustic beam deflection technique was used to obtain information on the radiation-film interaction processes, which can be used to validate the damage processes revealed by scanning electron microscopy (SEM). A large intrinsic tensile stress resulted from the mismatch between the thermal expansion coefficient of a fused silica substrate and the MgF2 film.

ASJC Scopus subject areas

Cite this

Laser damage studies on MgF2 thin films. / Protopapa, Maria Lucia; De Tomasi, Ferdinando; Perrone, Maria Rita et al.
In: Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films, Vol. 19, No. 2, 12.03.2001, p. 681-688.

Research output: Contribution to journal › Article › Research › peer review

Protopapa, ML, De Tomasi, F, Perrone, MR, Piegari, A, Masetti, E, Ristau, D, Quesnel, E & Duparré, A 2001, 'Laser damage studies on MgF2 thin films', Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films, vol. 19, no. 2, pp. 681-688. https://doi.org/10.1116/1.1347049
Protopapa, M. L., De Tomasi, F., Perrone, M. R., Piegari, A., Masetti, E., Ristau, D., Quesnel, E., & Duparré, A. (2001). Laser damage studies on MgF2 thin films. Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films, 19(2), 681-688. https://doi.org/10.1116/1.1347049
Protopapa ML, De Tomasi F, Perrone MR, Piegari A, Masetti E, Ristau D et al. Laser damage studies on MgF2 thin films. Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films. 2001 Mar 12;19(2):681-688. doi: 10.1116/1.1347049
Protopapa, Maria Lucia ; De Tomasi, Ferdinando ; Perrone, Maria Rita et al. / Laser damage studies on MgF2 thin films. In: Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films. 2001 ; Vol. 19, No. 2. pp. 681-688.
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