Laser conditioning of LaF3/MgF2 dielectric coatings for excimer lasers

Research output: Contribution to conference › Paper › Research › peer review

Authors

  • Norbert Kaiser
  • Bernhard Anton
  • H. Jaenchen
  • Klaus R. Mann
  • Eric Eva
  • C. Fischer
  • Rainer Henking
  • Detlev Ristau
  • Peter Weissbrodt
  • Dirk Mademann
  • L. Raupach
  • Erich Hacker

External Research Organisations

  • Laser-Laboratorium Göttingen e.V.
  • Laser Zentrum Hannover e.V. (LZH)
  • JENOPTIK Laser GmbH
  • Fraunhofer Institute for Applied Optics and Precision Engineering (IOF)
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Details

Original languageEnglish
Pages400-409
Number of pages10
Publication statusPublished - 14 Jul 1995
Externally publishedYes
Event1994 26th Annual Boulder Symposium on Laser-Induced Damage in Optical Materials - Boulder, CO, USA
Duration: 24 Oct 1994 → 26 Oct 1994

Conference

Conference1994 26th Annual Boulder Symposium on Laser-Induced Damage in Optical Materials
CityBoulder, CO, USA
Period24 Oct 1994 → 26 Oct 1994

Abstract

LaF 3/MgF 2-dieletric thin film combinations can be applied in optics for wavelengths down to 150 nm. Several such HR systems for a wavelength of 248 nm were investigated. In these coatings, the influence of laser conditioning on damage threshold and absorptivity was found to be remarkable. XPS- and TEM-investigations showed that the conditioning effect is related to structural and stoichiometric changes in the multilayers, especially in the near-surface-sublayers.

ASJC Scopus subject areas

Cite this

Laser conditioning of LaF3/MgF2 dielectric coatings for excimer lasers. / Kaiser, Norbert; Anton, Bernhard; Jaenchen, H. et al.
1995. 400-409 Paper presented at 1994 26th Annual Boulder Symposium on Laser-Induced Damage in Optical Materials, Boulder, CO, USA.

Research output: Contribution to conference › Paper › Research › peer review

Kaiser, N, Anton, B, Jaenchen, H, Mann, KR, Eva, E, Fischer, C, Henking, R, Ristau, D, Weissbrodt, P, Mademann, D, Raupach, L & Hacker, E 1995, 'Laser conditioning of LaF3/MgF2 dielectric coatings for excimer lasers', Paper presented at 1994 26th Annual Boulder Symposium on Laser-Induced Damage in Optical Materials, Boulder, CO, USA, 24 Oct 1994 - 26 Oct 1994 pp. 400-409. https://doi.org/10.1117/12.213762
Kaiser, N., Anton, B., Jaenchen, H., Mann, K. R., Eva, E., Fischer, C., Henking, R., Ristau, D., Weissbrodt, P., Mademann, D., Raupach, L., & Hacker, E. (1995). Laser conditioning of LaF3/MgF2 dielectric coatings for excimer lasers. 400-409. Paper presented at 1994 26th Annual Boulder Symposium on Laser-Induced Damage in Optical Materials, Boulder, CO, USA. https://doi.org/10.1117/12.213762
Kaiser N, Anton B, Jaenchen H, Mann KR, Eva E, Fischer C et al.. Laser conditioning of LaF3/MgF2 dielectric coatings for excimer lasers. 1995. Paper presented at 1994 26th Annual Boulder Symposium on Laser-Induced Damage in Optical Materials, Boulder, CO, USA. doi: 10.1117/12.213762
Kaiser, Norbert ; Anton, Bernhard ; Jaenchen, H. et al. / Laser conditioning of LaF3/MgF2 dielectric coatings for excimer lasers. Paper presented at 1994 26th Annual Boulder Symposium on Laser-Induced Damage in Optical Materials, Boulder, CO, USA.10 p.
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