Details
| Original language | English |
|---|---|
| Title of host publication | Magnetic Materials, Processes, and Devices VIII - Proceedings of the International Symposium |
| Pages | 525-535 |
| Number of pages | 11 |
| Publication status | Published - 2006 |
| Event | 206th ECS Meeting - Honolulu, HI, United States Duration: 5 Oct 2004 → 8 Oct 2004 |
Publication series
| Name | Proceedings - Electrochemical Society |
|---|---|
| Volume | PV 2004-23 |
Abstract
Soft magnetic materials are used in a multitude of applications in magnetic micro electro-mechanical systems (MEMS) such as microsensors or microactuators. The most commonly applied soft magnetic material is permalloy which is a NiFe alloy in a range of compositions. For NiFe81/19, the coefficient of magnetostriction λ is very small while forNiFe45/55 it has a maximum. Both alloys lend themselves to being deposited either by electroplating or by sputtering. This paper investigates the magnetic material properties as a function of the film thickness and the deposition process chosen.
ASJC Scopus subject areas
- Engineering(all)
- General Engineering
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Magnetic Materials, Processes, and Devices VIII - Proceedings of the International Symposium. 2006. p. 525-535 (Proceedings - Electrochemical Society; Vol. PV 2004-23).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Investigations on the permeability of electroplated and sputtered permalloy
AU - Wurz, M. C.
AU - Dinulovic, D.
AU - Gatzen, H. H.
PY - 2006
Y1 - 2006
N2 - Soft magnetic materials are used in a multitude of applications in magnetic micro electro-mechanical systems (MEMS) such as microsensors or microactuators. The most commonly applied soft magnetic material is permalloy which is a NiFe alloy in a range of compositions. For NiFe81/19, the coefficient of magnetostriction λ is very small while forNiFe45/55 it has a maximum. Both alloys lend themselves to being deposited either by electroplating or by sputtering. This paper investigates the magnetic material properties as a function of the film thickness and the deposition process chosen.
AB - Soft magnetic materials are used in a multitude of applications in magnetic micro electro-mechanical systems (MEMS) such as microsensors or microactuators. The most commonly applied soft magnetic material is permalloy which is a NiFe alloy in a range of compositions. For NiFe81/19, the coefficient of magnetostriction λ is very small while forNiFe45/55 it has a maximum. Both alloys lend themselves to being deposited either by electroplating or by sputtering. This paper investigates the magnetic material properties as a function of the film thickness and the deposition process chosen.
UR - http://www.scopus.com/inward/record.url?scp=40249093613&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:40249093613
SN - 1566775132
SN - 9781566775137
T3 - Proceedings - Electrochemical Society
SP - 525
EP - 535
BT - Magnetic Materials, Processes, and Devices VIII - Proceedings of the International Symposium
T2 - 206th ECS Meeting
Y2 - 5 October 2004 through 8 October 2004
ER -