Investigations on the oxide removal mechanism during ultrasonic wedge-wedge bonding process

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  • Laser Zentrum Hannover e.V. (LZH)
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Details

Original languageEnglish
Title of host publicationProceedings of the 2016 IEEE 18th Electronics Packaging Technology Conference, EPTC 2016
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages405-410
Number of pages6
ISBN (electronic)9781509043682
Publication statusPublished - 21 Feb 2017
Event18th IEEE Electronics Packaging Technology Conference, EPTC 2016 - Singapore, Singapore
Duration: 30 Nov 20163 Dec 2016

Abstract

As an inevitable step during ultrasonic bonding of aluminum or copper materials, the removal of oxides that prevent the bond formation is essential for obtaining high quality. Nevertheless, the oxides removal process is still unclear after tens of years' application of ultrasonic bonding. In this project, the removal mechanism was investigated via the analysis of an artificially coated oxide layer. The oxide removal process was observed in real-time by a high-speed observation system and the oxides distribution after the bonding process was observed under an electron microscope. The results show that during the bonding process, the detached oxides first agglomerate into larger particles and were then pressed outside of the contact area. The areas of the particles were counted and fit to a lognormal distribution.

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Cite this

Investigations on the oxide removal mechanism during ultrasonic wedge-wedge bonding process. / Long, Yangyang; Dencker, Folke; Schneider, Friedrich et al.
Proceedings of the 2016 IEEE 18th Electronics Packaging Technology Conference, EPTC 2016. Institute of Electrical and Electronics Engineers Inc., 2017. p. 405-410 7861512.

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Long, Y, Dencker, F, Schneider, F, Emde, B, Li, C, Hermsdorf, J, Wurz, MC & Twiefel, J 2017, Investigations on the oxide removal mechanism during ultrasonic wedge-wedge bonding process. in Proceedings of the 2016 IEEE 18th Electronics Packaging Technology Conference, EPTC 2016., 7861512, Institute of Electrical and Electronics Engineers Inc., pp. 405-410, 18th IEEE Electronics Packaging Technology Conference, EPTC 2016, Singapore, Singapore, 30 Nov 2016. https://doi.org/10.1109/EPTC.2016.7861512
Long, Y., Dencker, F., Schneider, F., Emde, B., Li, C., Hermsdorf, J., Wurz, M. C., & Twiefel, J. (2017). Investigations on the oxide removal mechanism during ultrasonic wedge-wedge bonding process. In Proceedings of the 2016 IEEE 18th Electronics Packaging Technology Conference, EPTC 2016 (pp. 405-410). Article 7861512 Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/EPTC.2016.7861512
Long Y, Dencker F, Schneider F, Emde B, Li C, Hermsdorf J et al. Investigations on the oxide removal mechanism during ultrasonic wedge-wedge bonding process. In Proceedings of the 2016 IEEE 18th Electronics Packaging Technology Conference, EPTC 2016. Institute of Electrical and Electronics Engineers Inc. 2017. p. 405-410. 7861512 doi: 10.1109/EPTC.2016.7861512
Long, Yangyang ; Dencker, Folke ; Schneider, Friedrich et al. / Investigations on the oxide removal mechanism during ultrasonic wedge-wedge bonding process. Proceedings of the 2016 IEEE 18th Electronics Packaging Technology Conference, EPTC 2016. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 405-410
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abstract = "As an inevitable step during ultrasonic bonding of aluminum or copper materials, the removal of oxides that prevent the bond formation is essential for obtaining high quality. Nevertheless, the oxides removal process is still unclear after tens of years' application of ultrasonic bonding. In this project, the removal mechanism was investigated via the analysis of an artificially coated oxide layer. The oxide removal process was observed in real-time by a high-speed observation system and the oxides distribution after the bonding process was observed under an electron microscope. The results show that during the bonding process, the detached oxides first agglomerate into larger particles and were then pressed outside of the contact area. The areas of the particles were counted and fit to a lognormal distribution.",
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AU - Long, Yangyang

AU - Dencker, Folke

AU - Schneider, Friedrich

AU - Emde, Benjamin

AU - Li, Chun

AU - Hermsdorf, Jörg

AU - Wurz, Marc Christopher

AU - Twiefel, Jens

N1 - Publisher Copyright: © 2016 IEEE. Copyright: Copyright 2017 Elsevier B.V., All rights reserved.

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