Details
| Original language | English |
|---|---|
| Pages (from-to) | 229-237 |
| Number of pages | 9 |
| Journal | Thin Solid Films |
| Volume | 397 |
| Issue number | 1-2 |
| Publication status | Published - 12 Oct 2001 |
| Externally published | Yes |
Abstract
Spectroscopic ellipsometry is a sensitive and reliable diagnostic tool for the optical properties of thin films and multi-layer coatings. In this paper we have derived new formulas permitting qualitative and quantitative analysis of the surface micro-roughness in the case where the refractive index of the film is close to that of the substrate. Theoretical results are applied to the developing of experimental data for lanthanum fluoride and magnesium fluoride thin films.
Keywords
- Ellipsometry, Fluorides, Inhomogeneity, Surface roughness
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Surfaces and Interfaces
- Materials Science(all)
- Surfaces, Coatings and Films
- Materials Science(all)
- Metals and Alloys
- Materials Science(all)
- Materials Chemistry
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In: Thin Solid Films, Vol. 397, No. 1-2, 12.10.2001, p. 229-237.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - Investigation of the surface micro-roughness of fluoride films by spectroscopic ellipsometry
AU - Tikhonravov, Alexander V.
AU - Trubetskov, Michael K.
AU - Krasilnikova, Anna V.
AU - Masetti, Enrico
AU - Duparré, Angela
AU - Quesnel, E.
AU - Ristau, Detlev
N1 - Funding information: This work was partially supported by European Commission under the TMR-Network programme ‘New optimization concepts for high quality UV-coatings’, contract N FMRX-CT97-0101 (DG12-MHT). The contribution to film deposition by R. Thielsch is gratefully acknowledged.
PY - 2001/10/12
Y1 - 2001/10/12
N2 - Spectroscopic ellipsometry is a sensitive and reliable diagnostic tool for the optical properties of thin films and multi-layer coatings. In this paper we have derived new formulas permitting qualitative and quantitative analysis of the surface micro-roughness in the case where the refractive index of the film is close to that of the substrate. Theoretical results are applied to the developing of experimental data for lanthanum fluoride and magnesium fluoride thin films.
AB - Spectroscopic ellipsometry is a sensitive and reliable diagnostic tool for the optical properties of thin films and multi-layer coatings. In this paper we have derived new formulas permitting qualitative and quantitative analysis of the surface micro-roughness in the case where the refractive index of the film is close to that of the substrate. Theoretical results are applied to the developing of experimental data for lanthanum fluoride and magnesium fluoride thin films.
KW - Ellipsometry
KW - Fluorides
KW - Inhomogeneity
KW - Surface roughness
UR - http://www.scopus.com/inward/record.url?scp=0035499309&partnerID=8YFLogxK
U2 - 10.1016/S0040-6090(01)01421-3
DO - 10.1016/S0040-6090(01)01421-3
M3 - Article
AN - SCOPUS:0035499309
VL - 397
SP - 229
EP - 237
JO - Thin Solid Films
JF - Thin Solid Films
SN - 0040-6090
IS - 1-2
ER -