Details
| Original language | English |
|---|---|
| Pages (from-to) | 873-879 |
| Number of pages | 7 |
| Journal | Scripta materialia |
| Volume | 52 |
| Issue number | 9 |
| Publication status | Published - May 2005 |
| Externally published | Yes |
Abstract
Au/Cr/Si microcantilevers were studied in their as-deposited condition and annealed state, with emphasis on a thermal treatment of 225 °C for 24 h. Change in beam curvature was monitored during isothermal hold as a function of time. Secondary grain growth was observed in the gold, which contained non-uniformly distributed twins and dislocation defects. Diffusional transport of the chromium layer was observed during annealing. Nodules arranged in a "rolling hill" topography were observed at the free surface, both before and after annealing. Nanometer thick coatings of alumina grown by atomic layer deposition improved the uniformity of both microstructure evolution and curvature evolution during high-temperature annealing.
Keywords
- Material stability, MEMS, Reliability, Thin metal films
ASJC Scopus subject areas
- Materials Science(all)
- General Materials Science
- Physics and Astronomy(all)
- Condensed Matter Physics
- Engineering(all)
- Mechanics of Materials
- Engineering(all)
- Mechanical Engineering
- Materials Science(all)
- Metals and Alloys
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In: Scripta materialia, Vol. 52, No. 9, 05.2005, p. 873-879.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - Intrinsic stress development and microstructure evolution of Au/Cr/Si multilayer thin films subject to annealing
AU - Miller, David C.
AU - Herrmann, Cari F.
AU - Maier, Hans J.
AU - George, Steve M.
AU - Stoldt, Conrad R.
AU - Gall, Ken
N1 - Funding Information: The authors would like to acknowledge Nancy Yang and her research group at Sandia National Laboratories for their help with microscopy and further materials characterization. The work is partially supported by a DOE PECASE for KG.
PY - 2005/5
Y1 - 2005/5
N2 - Au/Cr/Si microcantilevers were studied in their as-deposited condition and annealed state, with emphasis on a thermal treatment of 225 °C for 24 h. Change in beam curvature was monitored during isothermal hold as a function of time. Secondary grain growth was observed in the gold, which contained non-uniformly distributed twins and dislocation defects. Diffusional transport of the chromium layer was observed during annealing. Nodules arranged in a "rolling hill" topography were observed at the free surface, both before and after annealing. Nanometer thick coatings of alumina grown by atomic layer deposition improved the uniformity of both microstructure evolution and curvature evolution during high-temperature annealing.
AB - Au/Cr/Si microcantilevers were studied in their as-deposited condition and annealed state, with emphasis on a thermal treatment of 225 °C for 24 h. Change in beam curvature was monitored during isothermal hold as a function of time. Secondary grain growth was observed in the gold, which contained non-uniformly distributed twins and dislocation defects. Diffusional transport of the chromium layer was observed during annealing. Nodules arranged in a "rolling hill" topography were observed at the free surface, both before and after annealing. Nanometer thick coatings of alumina grown by atomic layer deposition improved the uniformity of both microstructure evolution and curvature evolution during high-temperature annealing.
KW - Material stability
KW - MEMS
KW - Reliability
KW - Thin metal films
UR - http://www.scopus.com/inward/record.url?scp=13644251778&partnerID=8YFLogxK
U2 - 10.1016/j.scriptamat.2005.01.004
DO - 10.1016/j.scriptamat.2005.01.004
M3 - Article
AN - SCOPUS:13644251778
VL - 52
SP - 873
EP - 879
JO - Scripta materialia
JF - Scripta materialia
SN - 1359-6462
IS - 9
ER -