Interface recombination parameters of atomic-layer-deposited Al 2O 3 on crystalline silicon

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Original languageEnglish
Article number073710
JournalJournal of applied physics
Volume111
Issue number7
Publication statusPublished - 1 Apr 2012
Externally publishedYes

Abstract

We measure the energy-dependent interface recombination parameters at the c-Si/Al 2O 3 interface using the frequency-dependent conductance technique. The hole capture cross section p (4±3)× 10 -16 cm 2 is energy-independent, whereas the electron capture cross section n shows a pronounced energy dependence and decreases from (7 ± 4)× 10 -15 cm 2 at midgap over two orders of magnitude toward the conduction band edge E c. The capture cross section ratio at midgap is highly asymmetric with σ np 5-70. The interface state density D it is of the order of 1× 10 11 eV -1 cm -2 at midgap. Besides the main defect, a second type of defect with a capture cross section below 10 -19 cm 2 is resolved near the valence band edge. Numerical calculations of the injection-dependent effective surface recombination velocity using the measured interface recombination parameters show an excellent agreement with experimental data measured using the photoconductance technique.

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Interface recombination parameters of atomic-layer-deposited Al 2O 3 on crystalline silicon. / Werner, F.; Cosceev, A.; Schmidt, J.
In: Journal of applied physics, Vol. 111, No. 7, 073710, 01.04.2012.

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abstract = "We measure the energy-dependent interface recombination parameters at the c-Si/Al 2O 3 interface using the frequency-dependent conductance technique. The hole capture cross section p (4±3)× 10 -16 cm 2 is energy-independent, whereas the electron capture cross section n shows a pronounced energy dependence and decreases from (7 ± 4)× 10 -15 cm 2 at midgap over two orders of magnitude toward the conduction band edge E c. The capture cross section ratio at midgap is highly asymmetric with σ n/σ p 5-70. The interface state density D it is of the order of 1× 10 11 eV -1 cm -2 at midgap. Besides the main defect, a second type of defect with a capture cross section below 10 -19 cm 2 is resolved near the valence band edge. Numerical calculations of the injection-dependent effective surface recombination velocity using the measured interface recombination parameters show an excellent agreement with experimental data measured using the photoconductance technique.",
author = "F. Werner and A. Cosceev and J. Schmidt",
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TY - JOUR

T1 - Interface recombination parameters of atomic-layer-deposited Al 2O 3 on crystalline silicon

AU - Werner, F.

AU - Cosceev, A.

AU - Schmidt, J.

N1 - Funding Information: Funding was provided by the State of Lower Saxony and the German Ministry for the Environment, Nature Conservation and Nuclear Safety (BMU) under contract number 0325050 (“ALD”).

PY - 2012/4/1

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N2 - We measure the energy-dependent interface recombination parameters at the c-Si/Al 2O 3 interface using the frequency-dependent conductance technique. The hole capture cross section p (4±3)× 10 -16 cm 2 is energy-independent, whereas the electron capture cross section n shows a pronounced energy dependence and decreases from (7 ± 4)× 10 -15 cm 2 at midgap over two orders of magnitude toward the conduction band edge E c. The capture cross section ratio at midgap is highly asymmetric with σ n/σ p 5-70. The interface state density D it is of the order of 1× 10 11 eV -1 cm -2 at midgap. Besides the main defect, a second type of defect with a capture cross section below 10 -19 cm 2 is resolved near the valence band edge. Numerical calculations of the injection-dependent effective surface recombination velocity using the measured interface recombination parameters show an excellent agreement with experimental data measured using the photoconductance technique.

AB - We measure the energy-dependent interface recombination parameters at the c-Si/Al 2O 3 interface using the frequency-dependent conductance technique. The hole capture cross section p (4±3)× 10 -16 cm 2 is energy-independent, whereas the electron capture cross section n shows a pronounced energy dependence and decreases from (7 ± 4)× 10 -15 cm 2 at midgap over two orders of magnitude toward the conduction band edge E c. The capture cross section ratio at midgap is highly asymmetric with σ n/σ p 5-70. The interface state density D it is of the order of 1× 10 11 eV -1 cm -2 at midgap. Besides the main defect, a second type of defect with a capture cross section below 10 -19 cm 2 is resolved near the valence band edge. Numerical calculations of the injection-dependent effective surface recombination velocity using the measured interface recombination parameters show an excellent agreement with experimental data measured using the photoconductance technique.

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