Details
| Original language | English |
|---|---|
| Title of host publication | Optifab 2023 |
| Editors | Jessica DeGroote Nelson, Blair Unger |
| Publisher | SPIE |
| Number of pages | 9 |
| ISBN (electronic) | 9781510668058 |
| Publication status | Published - 29 Nov 2023 |
| Event | Optifab 2023 - Rochester, United States Duration: 16 Oct 2023 → 19 Oct 2023 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Volume | 12778 |
| ISSN (Print) | 0277-786X |
| ISSN (electronic) | 1996-756X |
Abstract
New solutions are required for short-range optical transmission without lithography due to the complex and inflexible manufacturing processes. Glass is an excellent material for optical applications. Still, few microprocessing technologies are available, which are limited in precision and design freedom. A new glass micromachining process called Laser Induced Deep Etching (LIDE) can accurately machine many types of glass without generating micro-cracks, introducing stress, or causing other damage. This study uses LIDE to produce carrier substrates out of glass for integrated optical systems. Due to its transmission characteristics and refractive index, it also functions as optical cladding for integrated polymer optical waveguides. U-shaped cavities are etched into the glass and filled using the doctor-blade technologie with conventional liquid optical polymers, which are then globally cured. This novel manufacturing method is called LDB (LIDE-Doctor-blade). Optical waveguiding in the visible to near-infrared wavelength range is possible by the higher refractive index of the cured polymer. The waveguide is embedded in a near-surface cavity, with no additional upper cladding other than air to the environment, created by a combination of subtractive and additive manufacturing processes. The exposed area can affect transmission quality, and this study purposely exploits this by applying fluids with different properties, such as refractive index and viscosity. Changes in intensity are analyzed and evaluated to demonstrate a sensory function.
Keywords
- fluid sensor, Integrated optical system, thin glass, waveguide manufacturing
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
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Optifab 2023. ed. / Jessica DeGroote Nelson; Blair Unger. SPIE, 2023. 1277806 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 12778).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Integrated optical fluid sensor in glass
AU - Reitz, B.
AU - Leineweber, S.
AU - Overmeyer, L.
N1 - Funding Information: I want to thank LPKF for producing and providing the glass substrates. I would also like to thank my student Ulf Lennart Wüllner for his support in the lab. This research was funded by the Deutsche Forschungsgemeinschaft (DFG, German Research Foundation) under Germany's Excellence Strategy within the Cluster of Excellence PhoenixD (EXC 2122, Project ID 390833453).
PY - 2023/11/29
Y1 - 2023/11/29
N2 - New solutions are required for short-range optical transmission without lithography due to the complex and inflexible manufacturing processes. Glass is an excellent material for optical applications. Still, few microprocessing technologies are available, which are limited in precision and design freedom. A new glass micromachining process called Laser Induced Deep Etching (LIDE) can accurately machine many types of glass without generating micro-cracks, introducing stress, or causing other damage. This study uses LIDE to produce carrier substrates out of glass for integrated optical systems. Due to its transmission characteristics and refractive index, it also functions as optical cladding for integrated polymer optical waveguides. U-shaped cavities are etched into the glass and filled using the doctor-blade technologie with conventional liquid optical polymers, which are then globally cured. This novel manufacturing method is called LDB (LIDE-Doctor-blade). Optical waveguiding in the visible to near-infrared wavelength range is possible by the higher refractive index of the cured polymer. The waveguide is embedded in a near-surface cavity, with no additional upper cladding other than air to the environment, created by a combination of subtractive and additive manufacturing processes. The exposed area can affect transmission quality, and this study purposely exploits this by applying fluids with different properties, such as refractive index and viscosity. Changes in intensity are analyzed and evaluated to demonstrate a sensory function.
AB - New solutions are required for short-range optical transmission without lithography due to the complex and inflexible manufacturing processes. Glass is an excellent material for optical applications. Still, few microprocessing technologies are available, which are limited in precision and design freedom. A new glass micromachining process called Laser Induced Deep Etching (LIDE) can accurately machine many types of glass without generating micro-cracks, introducing stress, or causing other damage. This study uses LIDE to produce carrier substrates out of glass for integrated optical systems. Due to its transmission characteristics and refractive index, it also functions as optical cladding for integrated polymer optical waveguides. U-shaped cavities are etched into the glass and filled using the doctor-blade technologie with conventional liquid optical polymers, which are then globally cured. This novel manufacturing method is called LDB (LIDE-Doctor-blade). Optical waveguiding in the visible to near-infrared wavelength range is possible by the higher refractive index of the cured polymer. The waveguide is embedded in a near-surface cavity, with no additional upper cladding other than air to the environment, created by a combination of subtractive and additive manufacturing processes. The exposed area can affect transmission quality, and this study purposely exploits this by applying fluids with different properties, such as refractive index and viscosity. Changes in intensity are analyzed and evaluated to demonstrate a sensory function.
KW - fluid sensor
KW - Integrated optical system
KW - thin glass
KW - waveguide manufacturing
UR - http://www.scopus.com/inward/record.url?scp=85180151292&partnerID=8YFLogxK
U2 - 10.1117/12.2683935
DO - 10.1117/12.2683935
M3 - Conference contribution
AN - SCOPUS:85180151292
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Optifab 2023
A2 - Nelson, Jessica DeGroote
A2 - Unger, Blair
PB - SPIE
T2 - Optifab 2023
Y2 - 16 October 2023 through 19 October 2023
ER -