Details
| Original language | English |
|---|---|
| Title of host publication | Optical Interference Coatings |
| Subtitle of host publication | OIC 2013 |
| Publisher | OSA - The Optical Society |
| ISBN (print) | 9781557529701 |
| Publication status | Published - 2013 |
| Externally published | Yes |
| Event | Optical Interference Coatings, OIC 2013 - Whistler, Canada Duration: 16 Jun 2013 → 21 Jun 2013 |
Publication series
| Name | Optics InfoBase Conference Papers |
|---|---|
| ISSN (electronic) | 2162-2701 |
Abstract
In situ optical monitoring is widely used in modern high precision optical coating deposition. In Situ control of mechanical properties has the potential to be one of the next steps to a deterministic deposition process. The versatility of an in situ stress control in an IBS coating deposition process is presented in this study.
ASJC Scopus subject areas
- Physics and Astronomy(all)
- Instrumentation
- Physics and Astronomy(all)
- Atomic and Molecular Physics, and Optics
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Optical Interference Coatings: OIC 2013. OSA - The Optical Society, 2013. (Optics InfoBase Conference Papers).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - In-Situ control of stress in IBS deposition processes
AU - Günster, Stefan
AU - Ristau, Detlev
PY - 2013
Y1 - 2013
N2 - In situ optical monitoring is widely used in modern high precision optical coating deposition. In Situ control of mechanical properties has the potential to be one of the next steps to a deterministic deposition process. The versatility of an in situ stress control in an IBS coating deposition process is presented in this study.
AB - In situ optical monitoring is widely used in modern high precision optical coating deposition. In Situ control of mechanical properties has the potential to be one of the next steps to a deterministic deposition process. The versatility of an in situ stress control in an IBS coating deposition process is presented in this study.
UR - http://www.scopus.com/inward/record.url?scp=85085404467&partnerID=8YFLogxK
U2 - 10.1364/oic.2013.thb.2
DO - 10.1364/oic.2013.thb.2
M3 - Conference contribution
AN - SCOPUS:85085404467
SN - 9781557529701
T3 - Optics InfoBase Conference Papers
BT - Optical Interference Coatings
PB - OSA - The Optical Society
T2 - Optical Interference Coatings, OIC 2013
Y2 - 16 June 2013 through 21 June 2013
ER -