Influence of the number of double layers on the damage threshold of Al 2O3/SiO2 and LaF3/MgF2 mirrors at 248 nm

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

Authors

  • Eric Eva
  • Klaus R. Mann
  • Uwe B. Schallenberg
  • Norbert Kaiser
  • Rainer Henking
  • Detlev Ristau

External Research Organisations

  • Laser-Laboratorium Göttingen e.V.
  • Fraunhofer Institute for Applied Optics and Precision Engineering (IOF)
  • Laser Zentrum Hannover e.V. (LZH)
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Details

Original languageEnglish
Title of host publication27th Annual Boulder Damage Symposium
Subtitle of host publicationLaser-Induced Damage in Optical Materials: 1995
Place of PublicationBellingham
PublisherSPIE
Pages499-510
Number of pages12
ISBN (print)0-8194-2089-1
Publication statusPublished - 27 May 1996
Externally publishedYes
Event27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995 - Boulder, CO, United States
Duration: 30 Oct 1995 → 30 Oct 1995

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
PublisherSPIE
Volume2714
ISSN (Print)0277-786X

Abstract

KrF-laser induced damage thresholds (LIDT) of HR stacks were investigated as a function of the number of quarterwave layers. The findings were interpreted in terms of calorimetric absorption measurements and scatter defect density counts as well as an analysis of the standing wave electric field. Higher numbers of high-purity Al2O3/SiO2 layers resulted in enhanced LIDT by shielding the substrate surface increasingly well. Contrary to this, LIDT decreased with increasing numbers of e-beam evaporated LaF3/MgF2 layers. This was accompanied by elevated absorptance, defect density and conditionability at higher stack numbers.

Keywords

    Absorption, Boat evaporation, Conditioning, e-beam evaporation, Excimer lasers, Laser damage, Oxide and fluoride HR-coatings, Scatter defect density, Stack height, UV

ASJC Scopus subject areas

Cite this

Influence of the number of double layers on the damage threshold of Al 2O3/SiO2 and LaF3/MgF2 mirrors at 248 nm. / Eva, Eric; Mann, Klaus R.; Schallenberg, Uwe B. et al.
27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995. Bellingham: SPIE, 1996. p. 499-510 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 2714).

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

Eva, E, Mann, KR, Schallenberg, UB, Kaiser, N, Henking, R & Ristau, D 1996, Influence of the number of double layers on the damage threshold of Al 2O3/SiO2 and LaF3/MgF2 mirrors at 248 nm. in 27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995. Proceedings of SPIE - The International Society for Optical Engineering, vol. 2714, SPIE, Bellingham, pp. 499-510, 27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995, Boulder, CO, United States, 30 Oct 1995. https://doi.org/10.1117/12.240365
Eva, E., Mann, K. R., Schallenberg, U. B., Kaiser, N., Henking, R., & Ristau, D. (1996). Influence of the number of double layers on the damage threshold of Al 2O3/SiO2 and LaF3/MgF2 mirrors at 248 nm. In 27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995 (pp. 499-510). (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 2714). SPIE. https://doi.org/10.1117/12.240365
Eva E, Mann KR, Schallenberg UB, Kaiser N, Henking R, Ristau D. Influence of the number of double layers on the damage threshold of Al 2O3/SiO2 and LaF3/MgF2 mirrors at 248 nm. In 27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995. Bellingham: SPIE. 1996. p. 499-510. (Proceedings of SPIE - The International Society for Optical Engineering). doi: 10.1117/12.240365
Eva, Eric ; Mann, Klaus R. ; Schallenberg, Uwe B. et al. / Influence of the number of double layers on the damage threshold of Al 2O3/SiO2 and LaF3/MgF2 mirrors at 248 nm. 27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995. Bellingham : SPIE, 1996. pp. 499-510 (Proceedings of SPIE - The International Society for Optical Engineering).
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@inproceedings{587be1729c594af7926d486c11ad30f6,
title = "Influence of the number of double layers on the damage threshold of Al 2O3/SiO2 and LaF3/MgF2 mirrors at 248 nm",
abstract = "KrF-laser induced damage thresholds (LIDT) of HR stacks were investigated as a function of the number of quarterwave layers. The findings were interpreted in terms of calorimetric absorption measurements and scatter defect density counts as well as an analysis of the standing wave electric field. Higher numbers of high-purity Al2O3/SiO2 layers resulted in enhanced LIDT by shielding the substrate surface increasingly well. Contrary to this, LIDT decreased with increasing numbers of e-beam evaporated LaF3/MgF2 layers. This was accompanied by elevated absorptance, defect density and conditionability at higher stack numbers.",
keywords = "Absorption, Boat evaporation, Conditioning, e-beam evaporation, Excimer lasers, Laser damage, Oxide and fluoride HR-coatings, Scatter defect density, Stack height, UV",
author = "Eric Eva and Mann, {Klaus R.} and Schallenberg, {Uwe B.} and Norbert Kaiser and Rainer Henking and Detlev Ristau",
year = "1996",
month = may,
day = "27",
doi = "10.1117/12.240365",
language = "English",
isbn = "0-8194-2089-1",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
pages = "499--510",
booktitle = "27th Annual Boulder Damage Symposium",
address = "United States",
note = "27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995 ; Conference date: 30-10-1995 Through 30-10-1995",

}

Download

TY - GEN

T1 - Influence of the number of double layers on the damage threshold of Al 2O3/SiO2 and LaF3/MgF2 mirrors at 248 nm

AU - Eva, Eric

AU - Mann, Klaus R.

AU - Schallenberg, Uwe B.

AU - Kaiser, Norbert

AU - Henking, Rainer

AU - Ristau, Detlev

PY - 1996/5/27

Y1 - 1996/5/27

N2 - KrF-laser induced damage thresholds (LIDT) of HR stacks were investigated as a function of the number of quarterwave layers. The findings were interpreted in terms of calorimetric absorption measurements and scatter defect density counts as well as an analysis of the standing wave electric field. Higher numbers of high-purity Al2O3/SiO2 layers resulted in enhanced LIDT by shielding the substrate surface increasingly well. Contrary to this, LIDT decreased with increasing numbers of e-beam evaporated LaF3/MgF2 layers. This was accompanied by elevated absorptance, defect density and conditionability at higher stack numbers.

AB - KrF-laser induced damage thresholds (LIDT) of HR stacks were investigated as a function of the number of quarterwave layers. The findings were interpreted in terms of calorimetric absorption measurements and scatter defect density counts as well as an analysis of the standing wave electric field. Higher numbers of high-purity Al2O3/SiO2 layers resulted in enhanced LIDT by shielding the substrate surface increasingly well. Contrary to this, LIDT decreased with increasing numbers of e-beam evaporated LaF3/MgF2 layers. This was accompanied by elevated absorptance, defect density and conditionability at higher stack numbers.

KW - Absorption

KW - Boat evaporation

KW - Conditioning

KW - e-beam evaporation

KW - Excimer lasers

KW - Laser damage

KW - Oxide and fluoride HR-coatings

KW - Scatter defect density

KW - Stack height

KW - UV

UR - http://www.scopus.com/inward/record.url?scp=3943074821&partnerID=8YFLogxK

U2 - 10.1117/12.240365

DO - 10.1117/12.240365

M3 - Conference contribution

AN - SCOPUS:3943074821

SN - 0-8194-2089-1

T3 - Proceedings of SPIE - The International Society for Optical Engineering

SP - 499

EP - 510

BT - 27th Annual Boulder Damage Symposium

PB - SPIE

CY - Bellingham

T2 - 27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995

Y2 - 30 October 1995 through 30 October 1995

ER -