Details
| Original language | English |
|---|---|
| Title of host publication | Optical Interference Coatings |
| Subtitle of host publication | OIC 2013 |
| Publisher | OSA - The Optical Society |
| ISBN (print) | 9781557529701 |
| Publication status | Published - 2013 |
| Event | Optical Interference Coatings, OIC 2013 - Whistler, Canada Duration: 16 Jun 2013 → 21 Jun 2013 |
Publication series
| Name | Optics InfoBase Conference Papers |
|---|---|
| ISSN (electronic) | 2162-2701 |
Abstract
An electromagnetic field guiding device was implemented into an Ion Beam Sputtering (IBS) process. The EM-field causes higher deposition rates on the substrate. The efficiency of the guidance could be improved by optimization of the plasma conditions.
ASJC Scopus subject areas
- Physics and Astronomy(all)
- Instrumentation
- Physics and Astronomy(all)
- Atomic and Molecular Physics, and Optics
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Optical Interference Coatings: OIC 2013. OSA - The Optical Society, 2013. (Optics InfoBase Conference Papers).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Influence of coating parameters on the efficiency in a modified IBS process
AU - Malobabic, Sina
AU - Jupé, Marco
AU - Ristau, Detlev
PY - 2013
Y1 - 2013
N2 - An electromagnetic field guiding device was implemented into an Ion Beam Sputtering (IBS) process. The EM-field causes higher deposition rates on the substrate. The efficiency of the guidance could be improved by optimization of the plasma conditions.
AB - An electromagnetic field guiding device was implemented into an Ion Beam Sputtering (IBS) process. The EM-field causes higher deposition rates on the substrate. The efficiency of the guidance could be improved by optimization of the plasma conditions.
UR - http://www.scopus.com/inward/record.url?scp=85085403265&partnerID=8YFLogxK
U2 - 10.1364/oic.2013.thb.4
DO - 10.1364/oic.2013.thb.4
M3 - Conference contribution
AN - SCOPUS:85085403265
SN - 9781557529701
T3 - Optics InfoBase Conference Papers
BT - Optical Interference Coatings
PB - OSA - The Optical Society
T2 - Optical Interference Coatings, OIC 2013
Y2 - 16 June 2013 through 21 June 2013
ER -