Details
| Original language | English |
|---|---|
| Pages (from-to) | 1715-1722 |
| Number of pages | 8 |
| Journal | Applied optics |
| Volume | 64 |
| Issue number | 7 |
| Publication status | Published - 24 Feb 2025 |
Abstract
The transparent and conductive properties of indium tin oxide (ITO) thin films make them an attractive coating for optically integrated ion traps. However, the relatively low transmittance for wavelengths<400 nm, high scattering, and high production temperature limit the usability in trapped-ion-based quantum technologies. Here we present ITO coatings and a combined ITO+anti-reflective (AR) coating system optimized for an ion trap applied using ion beam sputtering (IBS). The coatings feature a high transmittance for wavelengths <400 nm and additional wavelengths up to 1000 nm, low scattering, and low production temperature <150 ◦C. The transmission, reflection, and absorption spectra are simulated and the resistance, transmittance, and scattering at 370 nm are measured for different ITO coating thicknesses and the ITO + AR coating system. For the ITO + AR coating system a resistance of 115 ± 5/, transmittance of 80%, and scattering of 0.012 ± 0.002% at 370 nm are achieved.
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In: Applied optics, Vol. 64, No. 7, 24.02.2025, p. 1715-1722.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - Indium tin oxide combined with anti-reflective coatings with high transmittance for wavelengths
AU - Jansson, Erik
AU - Scheuer, Volker
AU - Jordan, Elena
AU - Kostourou, Konstantina
AU - Mehlstäubler, Tanja e.
PY - 2025/2/24
Y1 - 2025/2/24
N2 - The transparent and conductive properties of indium tin oxide (ITO) thin films make them an attractive coating for optically integrated ion traps. However, the relatively low transmittance for wavelengths<400 nm, high scattering, and high production temperature limit the usability in trapped-ion-based quantum technologies. Here we present ITO coatings and a combined ITO+anti-reflective (AR) coating system optimized for an ion trap applied using ion beam sputtering (IBS). The coatings feature a high transmittance for wavelengths <400 nm and additional wavelengths up to 1000 nm, low scattering, and low production temperature <150 ◦C. The transmission, reflection, and absorption spectra are simulated and the resistance, transmittance, and scattering at 370 nm are measured for different ITO coating thicknesses and the ITO + AR coating system. For the ITO + AR coating system a resistance of 115 ± 5/, transmittance of 80%, and scattering of 0.012 ± 0.002% at 370 nm are achieved.
AB - The transparent and conductive properties of indium tin oxide (ITO) thin films make them an attractive coating for optically integrated ion traps. However, the relatively low transmittance for wavelengths<400 nm, high scattering, and high production temperature limit the usability in trapped-ion-based quantum technologies. Here we present ITO coatings and a combined ITO+anti-reflective (AR) coating system optimized for an ion trap applied using ion beam sputtering (IBS). The coatings feature a high transmittance for wavelengths <400 nm and additional wavelengths up to 1000 nm, low scattering, and low production temperature <150 ◦C. The transmission, reflection, and absorption spectra are simulated and the resistance, transmittance, and scattering at 370 nm are measured for different ITO coating thicknesses and the ITO + AR coating system. For the ITO + AR coating system a resistance of 115 ± 5/, transmittance of 80%, and scattering of 0.012 ± 0.002% at 370 nm are achieved.
UR - http://www.scopus.com/inward/record.url?scp=86000358160&partnerID=8YFLogxK
U2 - 10.1364/AO.547471
DO - 10.1364/AO.547471
M3 - Article
VL - 64
SP - 1715
EP - 1722
JO - Applied optics
JF - Applied optics
SN - 0003-6935
IS - 7
ER -