Details
| Original language | English |
|---|---|
| Pages (from-to) | 141-146 |
| Number of pages | 6 |
| Journal | Frontiers of materials science |
| Volume | 9 |
| Issue number | 2 |
| Publication status | Published - 26 Jun 2015 |
Abstract
The step-flow growth condition of Si on Si(111) near the (7×7)-“1×1” surface phase transition temperature TC are analyzed within the framework of Burton-Cabrera-Frank theory. In particular, coexistence of both surface phases well below TC and their specific influence on the step-flow growth behavior are considered. We presume that under dynamical condition of growth, the surface initially covered by only the (7×7) phase separates into domains surrounded by “1×1” areas. On such a surface, the overall supersaturation should be reduced drastically compared to a surface with only (7×7), resulting in much larger critical terrace width for nucleation.
Keywords
- molecular beam epitaxy, silicon, step-flow growth mode, surface superstructure
ASJC Scopus subject areas
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In: Frontiers of materials science, Vol. 9, No. 2, 26.06.2015, p. 141-146.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - Impact of surface phase coexistence on the development of step-free areas on Si(111)
AU - Fissel, Andreas
AU - Chaudhuri, Ayan Roy
AU - Krügener, Jan
AU - Gribisch, Philipp
AU - Osten, H. Jörg
PY - 2015/6/26
Y1 - 2015/6/26
N2 - The step-flow growth condition of Si on Si(111) near the (7×7)-“1×1” surface phase transition temperature TC are analyzed within the framework of Burton-Cabrera-Frank theory. In particular, coexistence of both surface phases well below TC and their specific influence on the step-flow growth behavior are considered. We presume that under dynamical condition of growth, the surface initially covered by only the (7×7) phase separates into domains surrounded by “1×1” areas. On such a surface, the overall supersaturation should be reduced drastically compared to a surface with only (7×7), resulting in much larger critical terrace width for nucleation.
AB - The step-flow growth condition of Si on Si(111) near the (7×7)-“1×1” surface phase transition temperature TC are analyzed within the framework of Burton-Cabrera-Frank theory. In particular, coexistence of both surface phases well below TC and their specific influence on the step-flow growth behavior are considered. We presume that under dynamical condition of growth, the surface initially covered by only the (7×7) phase separates into domains surrounded by “1×1” areas. On such a surface, the overall supersaturation should be reduced drastically compared to a surface with only (7×7), resulting in much larger critical terrace width for nucleation.
KW - molecular beam epitaxy
KW - silicon
KW - step-flow growth mode
KW - surface superstructure
UR - http://www.scopus.com/inward/record.url?scp=84929842049&partnerID=8YFLogxK
U2 - 10.1007/s11706-015-0282-z
DO - 10.1007/s11706-015-0282-z
M3 - Article
AN - SCOPUS:84929842049
VL - 9
SP - 141
EP - 146
JO - Frontiers of materials science
JF - Frontiers of materials science
SN - 2095-025X
IS - 2
ER -