Impact of deposition conditions on nanostructured anisotropic silica thin films in multilayer interference coatings

Research output: Contribution to journalArticleResearchpeer review

Authors

  • Lina Grineviciute
  • Holger Badorreck
  • Lars Jensen
  • Detlev Ristau
  • Marco Jupé
  • Algirdas Selskis
  • Tomas Tolenis

External Research Organisations

  • Center for Physical Sciences and Technology (FTMC)
  • Laser Zentrum Hannover e.V. (LZH)
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Details

Original languageEnglish
Article number150167
JournalApplied surface science
Volume562
Early online date23 May 2021
Publication statusPublished - 1 Oct 2021

Abstract

Recent developments of nanostructured coatings have reached a point where extensive investigations within multi-layer systems are necessary for further implementation in novel photonic systems. Although sculptured thin films are explored for decades, no optical and structural measurements have been performed for anisotropic nanostructured multi-layer coatings with different deposition conditions of the dense layer. In this paper, we present extensive morphological analysis on silica nanostructured anisotropic films. Changing the deposition angle from 66° to 84°, indicate the changes in surface filling from 84% to 57%, respectively, while phase retardance has a maximal value of 0.032°/nm at 70° and 72° angles. We also present the investigation of covering such structures with the dense layer at different conditions. As a result, the technology for maintaining initial anisotropic properties is developed for extending spectral difference 1.6 times and phase retardation by 5% in anisotropic multi-layer coatings. Furthermore, we present simulations of growing silica layer using experimental conditions in the Virtual Coater framework resulting in virtual anisotropic films for comparison with measurements. The minimal impact on the anisotropy of porous layer is reached with the deposition of dense layer at 30° angle during constant substrate rotation.

Keywords

    Anisotropic coatings, Effective refractive index, Molecular dynamics, Phase retardance, Sculptured thin films, Surface filling

ASJC Scopus subject areas

Cite this

Impact of deposition conditions on nanostructured anisotropic silica thin films in multilayer interference coatings. / Grineviciute, Lina; Badorreck, Holger; Jensen, Lars et al.
In: Applied surface science, Vol. 562, 150167, 01.10.2021.

Research output: Contribution to journalArticleResearchpeer review

Grineviciute, L., Badorreck, H., Jensen, L., Ristau, D., Jupé, M., Selskis, A., & Tolenis, T. (2021). Impact of deposition conditions on nanostructured anisotropic silica thin films in multilayer interference coatings. Applied surface science, 562, Article 150167. https://doi.org/10.1016/j.apsusc.2021.150167
Grineviciute L, Badorreck H, Jensen L, Ristau D, Jupé M, Selskis A et al. Impact of deposition conditions on nanostructured anisotropic silica thin films in multilayer interference coatings. Applied surface science. 2021 Oct 1;562:150167. Epub 2021 May 23. doi: 10.1016/j.apsusc.2021.150167
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abstract = "Recent developments of nanostructured coatings have reached a point where extensive investigations within multi-layer systems are necessary for further implementation in novel photonic systems. Although sculptured thin films are explored for decades, no optical and structural measurements have been performed for anisotropic nanostructured multi-layer coatings with different deposition conditions of the dense layer. In this paper, we present extensive morphological analysis on silica nanostructured anisotropic films. Changing the deposition angle from 66° to 84°, indicate the changes in surface filling from 84% to 57%, respectively, while phase retardance has a maximal value of 0.032°/nm at 70° and 72° angles. We also present the investigation of covering such structures with the dense layer at different conditions. As a result, the technology for maintaining initial anisotropic properties is developed for extending spectral difference 1.6 times and phase retardation by 5% in anisotropic multi-layer coatings. Furthermore, we present simulations of growing silica layer using experimental conditions in the Virtual Coater framework resulting in virtual anisotropic films for comparison with measurements. The minimal impact on the anisotropy of porous layer is reached with the deposition of dense layer at 30° angle during constant substrate rotation.",
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AU - Jupé, Marco

AU - Selskis, Algirdas

AU - Tolenis, Tomas

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