Details
| Translated title of the contribution | A hybrid manufacturing process for the integration of pressure sensors on the surface of disc springs |
|---|---|
| Original language | German |
| Title of host publication | MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings |
| Publisher | VDE Verlag GmbH |
| Pages | 563-566 |
| Number of pages | 4 |
| ISBN (electronic) | 9783800741007 |
| Publication status | Published - 2015 |
| Event | MikroSystemTechnik Kongress 2015: MEMS, Mikroelektronik, Systeme - MikroSystemTechnik Conference 2015: MEMS, Microelectronics, Systems - Karlsruhe, Germany Duration: 26 Oct 2015 → 28 Oct 2015 |
Publication series
| Name | MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings |
|---|
Abstract
At the Institute for Micro Production Technology (IMPT) of the Leibniz Universität Hannover a hybrid manufacturing process has been developed for the deposition of pressure sensors directly onto the surface of disc springs. In this article we present a hybrid process chain that combines the thin film processing of metallic strain gauges with subsequent machining and forming steps. Spring discs designed for the integration into a machine guide were chosen as an exemplary application. In this manner, a pressure measurement within the contact area between a guiding rail and machine stage or a guide carriage and carriage should be realised. Using the manufacturing process presented in this article, strain gauges integrated onto spring discs were implemented. The functionality of these prototypes has been verified experimentally.
ASJC Scopus subject areas
- Engineering(all)
- Electrical and Electronic Engineering
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Materials Science(all)
- Surfaces, Coatings and Films
- Physics and Astronomy(all)
- Condensed Matter Physics
- Physics and Astronomy(all)
- Atomic and Molecular Physics, and Optics
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MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, 2015. p. 563-566 (MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Hybrider Fertigungsprozess zur Integration von Drucksensoren auf die Oberfläche von Tellerfedern
AU - Rittinger, Johannes
AU - Klaas, Daniel
AU - Wurz, Marc Christopher
AU - Rissing, Lutz
N1 - Publisher Copyright: © Technische Universität Wien.All right reserved. Copyright: Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2015
Y1 - 2015
N2 - At the Institute for Micro Production Technology (IMPT) of the Leibniz Universität Hannover a hybrid manufacturing process has been developed for the deposition of pressure sensors directly onto the surface of disc springs. In this article we present a hybrid process chain that combines the thin film processing of metallic strain gauges with subsequent machining and forming steps. Spring discs designed for the integration into a machine guide were chosen as an exemplary application. In this manner, a pressure measurement within the contact area between a guiding rail and machine stage or a guide carriage and carriage should be realised. Using the manufacturing process presented in this article, strain gauges integrated onto spring discs were implemented. The functionality of these prototypes has been verified experimentally.
AB - At the Institute for Micro Production Technology (IMPT) of the Leibniz Universität Hannover a hybrid manufacturing process has been developed for the deposition of pressure sensors directly onto the surface of disc springs. In this article we present a hybrid process chain that combines the thin film processing of metallic strain gauges with subsequent machining and forming steps. Spring discs designed for the integration into a machine guide were chosen as an exemplary application. In this manner, a pressure measurement within the contact area between a guiding rail and machine stage or a guide carriage and carriage should be realised. Using the manufacturing process presented in this article, strain gauges integrated onto spring discs were implemented. The functionality of these prototypes has been verified experimentally.
UR - http://www.scopus.com/inward/record.url?scp=85096893258&partnerID=8YFLogxK
M3 - Aufsatz in Konferenzband
AN - SCOPUS:85096893258
T3 - MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings
SP - 563
EP - 566
BT - MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings
PB - VDE Verlag GmbH
T2 - MikroSystemTechnik Kongress 2015: MEMS, Mikroelektronik, Systeme - MikroSystemTechnik Conference 2015: MEMS, Microelectronics, Systems
Y2 - 26 October 2015 through 28 October 2015
ER -