Details
| Original language | English |
|---|---|
| Pages (from-to) | 905-909 |
| Number of pages | 5 |
| Journal | Procedia CIRP |
| Volume | 94 |
| Early online date | 15 Sept 2020 |
| Publication status | Published - 2020 |
| Externally published | Yes |
| Event | 11th CIRP Conference on Photonic Technologies, LANE 2020 - Virtual, Online Duration: 7 Sept 2020 → 10 Sept 2020 |
Abstract
Laser annealed sol-gel layers have the potential to replace the furnace process and expand the field of applications for selective annealed sol-gel coatings. In this study laser annealed TiO2, ZrO2 and ITO layers on glasses are investigated. Processing parameters of the CO2-laser system such as scanning speed, line overlap, laser power and focal spot are evaluated to generate sufficient thermal energy for densification. The ITO annealing process results in a sheet resistance comparable with the furnace annealed samples. Microscope images of the TiO2 and ZrO2 samples show a homogeneous layer morphology. XRD images exhibit crystalline tetragonal ZrO2 as seen in thermally annealed layers.
Keywords
- ITO, Laser annealing sol gel coating, Surface functionalization, TiO2, ZrO2
ASJC Scopus subject areas
- Engineering(all)
- Control and Systems Engineering
- Engineering(all)
- Industrial and Manufacturing Engineering
Cite this
- Standard
- Harvard
- Apa
- Vancouver
- BibTeX
- RIS
In: Procedia CIRP, Vol. 94, 2020, p. 905-909.
Research output: Contribution to journal › Conference article › Research › peer review
}
TY - JOUR
T1 - Homogeneous annealing of TiO2, ZrO2 and ITO sol-gel layers with CO2 laser
AU - Desens, M.
AU - Wesang, K.
AU - Hohnholz, A.
AU - Jäschke, P.
AU - Kaierle, S.
AU - Overmeyer, L.
N1 - Funding Information: The proectj "Laser annealing of coatings for the industrial production" with the acronym "LaSiP" was financed by AIF - IGF 19454 N together with the project partner Fraunhofer Institute for Silicate research (ISC), who prepared the dipcoated samples.
PY - 2020
Y1 - 2020
N2 - Laser annealed sol-gel layers have the potential to replace the furnace process and expand the field of applications for selective annealed sol-gel coatings. In this study laser annealed TiO2, ZrO2 and ITO layers on glasses are investigated. Processing parameters of the CO2-laser system such as scanning speed, line overlap, laser power and focal spot are evaluated to generate sufficient thermal energy for densification. The ITO annealing process results in a sheet resistance comparable with the furnace annealed samples. Microscope images of the TiO2 and ZrO2 samples show a homogeneous layer morphology. XRD images exhibit crystalline tetragonal ZrO2 as seen in thermally annealed layers.
AB - Laser annealed sol-gel layers have the potential to replace the furnace process and expand the field of applications for selective annealed sol-gel coatings. In this study laser annealed TiO2, ZrO2 and ITO layers on glasses are investigated. Processing parameters of the CO2-laser system such as scanning speed, line overlap, laser power and focal spot are evaluated to generate sufficient thermal energy for densification. The ITO annealing process results in a sheet resistance comparable with the furnace annealed samples. Microscope images of the TiO2 and ZrO2 samples show a homogeneous layer morphology. XRD images exhibit crystalline tetragonal ZrO2 as seen in thermally annealed layers.
KW - ITO
KW - Laser annealing sol gel coating
KW - Surface functionalization
KW - TiO2
KW - ZrO2
UR - http://www.scopus.com/inward/record.url?scp=85093364128&partnerID=8YFLogxK
U2 - 10.1016/j.procir.2020.09.070
DO - 10.1016/j.procir.2020.09.070
M3 - Conference article
AN - SCOPUS:85093364128
VL - 94
SP - 905
EP - 909
JO - Procedia CIRP
JF - Procedia CIRP
SN - 2212-8271
T2 - 11th CIRP Conference on Photonic Technologies, LANE 2020
Y2 - 7 September 2020 through 10 September 2020
ER -