Details
| Original language | English |
|---|---|
| Pages (from-to) | 1232-1240 |
| Number of pages | 9 |
| Journal | Applied Optics |
| Volume | 54 |
| Issue number | 6 |
| Publication status | Published - 20 Feb 2015 |
Abstract
We propose a novel measurement system based on a low coherence Michelson interferometer and six-axis hexapod platform to accurately measure structures with high aspect ratio using different tilt angles of the measured surface. In order to realize automatic measurement, the system is designed to automatically perform autofocusing, adjust the tilt angle of the test surface, make surface measurements, and merge the measurement data sets. Due to certain topography, e.g., structures with high aspect ratio, the interferometer cannot obtain enough reflected light to evaluate the height information in some areas of the test surface. For this reason, we developed a measurement system that uses measurements from different tilt angles of the test surface and stitching algorithms to realize a complete surface measurement data set. The performance of the proposed measurement system is evaluated experimentally and compared to the results of measurements using a perthometer.
ASJC Scopus subject areas
- Physics and Astronomy(all)
- Atomic and Molecular Physics, and Optics
- Engineering(all)
- Engineering (miscellaneous)
- Engineering(all)
- Electrical and Electronic Engineering
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In: Applied Optics, Vol. 54, No. 6, 20.02.2015, p. 1232-1240.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - High-precision surface measurement with an automated multiangle low coherence interferometer
AU - Li, Yinan
AU - Kästner, Markus
AU - Reithmeier, Eduard
N1 - Publisher Copyright: © 2015 Optical Society of America. Copyright: Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2015/2/20
Y1 - 2015/2/20
N2 - We propose a novel measurement system based on a low coherence Michelson interferometer and six-axis hexapod platform to accurately measure structures with high aspect ratio using different tilt angles of the measured surface. In order to realize automatic measurement, the system is designed to automatically perform autofocusing, adjust the tilt angle of the test surface, make surface measurements, and merge the measurement data sets. Due to certain topography, e.g., structures with high aspect ratio, the interferometer cannot obtain enough reflected light to evaluate the height information in some areas of the test surface. For this reason, we developed a measurement system that uses measurements from different tilt angles of the test surface and stitching algorithms to realize a complete surface measurement data set. The performance of the proposed measurement system is evaluated experimentally and compared to the results of measurements using a perthometer.
AB - We propose a novel measurement system based on a low coherence Michelson interferometer and six-axis hexapod platform to accurately measure structures with high aspect ratio using different tilt angles of the measured surface. In order to realize automatic measurement, the system is designed to automatically perform autofocusing, adjust the tilt angle of the test surface, make surface measurements, and merge the measurement data sets. Due to certain topography, e.g., structures with high aspect ratio, the interferometer cannot obtain enough reflected light to evaluate the height information in some areas of the test surface. For this reason, we developed a measurement system that uses measurements from different tilt angles of the test surface and stitching algorithms to realize a complete surface measurement data set. The performance of the proposed measurement system is evaluated experimentally and compared to the results of measurements using a perthometer.
UR - http://www.scopus.com/inward/record.url?scp=84942373517&partnerID=8YFLogxK
U2 - 10.1364/AO.54.001232
DO - 10.1364/AO.54.001232
M3 - Article
AN - SCOPUS:84942373517
VL - 54
SP - 1232
EP - 1240
JO - Applied Optics
JF - Applied Optics
SN - 1559-128X
IS - 6
ER -