Details
| Original language | English |
|---|---|
| Pages (from-to) | 504-530 |
| Number of pages | 27 |
| Journal | SIAM Journal on Applied Mathematics |
| Volume | 78 |
| Issue number | 1 |
| Publication status | Published - 15 Feb 2018 |
Abstract
An idealized electrostatically actuated microelectromechanical system involving an elastic plate with a heterogeneous dielectric material is considered. Starting from the electrostatic and mechanical energies, the governing evolution equations for the electrostatic potential and the plate de ection are derived from the corresponding energy balance. This leads to a free boundary transmission problem due to a jump of the dielectric permittivity across the interface separating the elastic plate and free space. Reduced models retaining the in uence of the heterogeneity of the elastic plate under suitable assumptions are obtained when either the elastic's plate thickness or the aspect ratio of the device vanishes.
Keywords
- Free boundary problem, MEMS, Transmission problem, Vanishing aspect ratio, Variational inequality
ASJC Scopus subject areas
- Mathematics(all)
- Applied Mathematics
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In: SIAM Journal on Applied Mathematics, Vol. 78, No. 1, 15.02.2018, p. 504-530.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - Heterogeneous dielectric properties in models for microelectromechanical systems
AU - Laurencot, Philippe
AU - Walker, Christoph
PY - 2018/2/15
Y1 - 2018/2/15
N2 - An idealized electrostatically actuated microelectromechanical system involving an elastic plate with a heterogeneous dielectric material is considered. Starting from the electrostatic and mechanical energies, the governing evolution equations for the electrostatic potential and the plate de ection are derived from the corresponding energy balance. This leads to a free boundary transmission problem due to a jump of the dielectric permittivity across the interface separating the elastic plate and free space. Reduced models retaining the in uence of the heterogeneity of the elastic plate under suitable assumptions are obtained when either the elastic's plate thickness or the aspect ratio of the device vanishes.
AB - An idealized electrostatically actuated microelectromechanical system involving an elastic plate with a heterogeneous dielectric material is considered. Starting from the electrostatic and mechanical energies, the governing evolution equations for the electrostatic potential and the plate de ection are derived from the corresponding energy balance. This leads to a free boundary transmission problem due to a jump of the dielectric permittivity across the interface separating the elastic plate and free space. Reduced models retaining the in uence of the heterogeneity of the elastic plate under suitable assumptions are obtained when either the elastic's plate thickness or the aspect ratio of the device vanishes.
KW - Free boundary problem
KW - MEMS
KW - Transmission problem
KW - Vanishing aspect ratio
KW - Variational inequality
UR - http://www.scopus.com/inward/record.url?scp=85043769897&partnerID=8YFLogxK
U2 - 10.1137/17M1117483
DO - 10.1137/17M1117483
M3 - Article
AN - SCOPUS:85043769897
VL - 78
SP - 504
EP - 530
JO - SIAM Journal on Applied Mathematics
JF - SIAM Journal on Applied Mathematics
SN - 0036-1399
IS - 1
ER -