Details
| Translated title of the contribution | Fabrication of co-resonantly coupled cantilever sensors with geometric eigenfrequency matching |
|---|---|
| Original language | German |
| Title of host publication | MikroSystemTechnik Kongress 2023 |
| Subtitle of host publication | Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Nachhaltigkeit und Technologiesouveranitat, Proceedings |
| Publisher | VDE Verlag GmbH |
| Pages | 470-472 |
| Number of pages | 3 |
| ISBN (electronic) | 9783800762040 |
| Publication status | Published - 2023 |
| Event | MicroSystems Technology Congress 2023: Microelectronics, Microsystems Technology and their Applications - Sustainability and Technology Sovereignty - Dresden, Germany Duration: 23 Oct 2023 → 25 Oct 2023 |
Abstract
The concept of co-resonant coupling enables a significant sensitivity increase of dynamic mode cantilever sensors, while maintaining oscillation detection with established methods. The concept is based on mechanical coupling and eigenfrequency matching of a microcantilever and a low-stiffness nanocantilever. Fabrication of sensors with predefined parameters (e.g. sensitivity, linear range) requires very accurate eigenfrequency matching that can be achieved by appropriate definition of the cantilever geometries. As even small deviations, especially for the nanocantilever's thickness and/or length, can already lead to rather large alterations of the matching state and change of sensors parameters, a fabrication process with high precision is crucial. Here, we report such a fabrication process for controlled and very defined geometrically eigenfrequency matched co-resonantly coupled cantilever sensors.
ASJC Scopus subject areas
- Engineering(all)
- Electrical and Electronic Engineering
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Materials Science(all)
- Surfaces, Coatings and Films
- Physics and Astronomy(all)
- Condensed Matter Physics
- Physics and Astronomy(all)
- Atomic and Molecular Physics, and Optics
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MikroSystemTechnik Kongress 2023: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Nachhaltigkeit und Technologiesouveranitat, Proceedings. VDE Verlag GmbH, 2023. p. 470-472.
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Herstellung ko-resonant gekoppelter Cantilever-Sensoren mit geometrischer Frequenzanpassung
AU - Lampouras, Ioannis
AU - Körner, Julia
N1 - Publisher Copyright: © VDE VERLAG GMBH ∙ Berlin ∙ Offenbach.
PY - 2023
Y1 - 2023
N2 - The concept of co-resonant coupling enables a significant sensitivity increase of dynamic mode cantilever sensors, while maintaining oscillation detection with established methods. The concept is based on mechanical coupling and eigenfrequency matching of a microcantilever and a low-stiffness nanocantilever. Fabrication of sensors with predefined parameters (e.g. sensitivity, linear range) requires very accurate eigenfrequency matching that can be achieved by appropriate definition of the cantilever geometries. As even small deviations, especially for the nanocantilever's thickness and/or length, can already lead to rather large alterations of the matching state and change of sensors parameters, a fabrication process with high precision is crucial. Here, we report such a fabrication process for controlled and very defined geometrically eigenfrequency matched co-resonantly coupled cantilever sensors.
AB - The concept of co-resonant coupling enables a significant sensitivity increase of dynamic mode cantilever sensors, while maintaining oscillation detection with established methods. The concept is based on mechanical coupling and eigenfrequency matching of a microcantilever and a low-stiffness nanocantilever. Fabrication of sensors with predefined parameters (e.g. sensitivity, linear range) requires very accurate eigenfrequency matching that can be achieved by appropriate definition of the cantilever geometries. As even small deviations, especially for the nanocantilever's thickness and/or length, can already lead to rather large alterations of the matching state and change of sensors parameters, a fabrication process with high precision is crucial. Here, we report such a fabrication process for controlled and very defined geometrically eigenfrequency matched co-resonantly coupled cantilever sensors.
UR - http://www.scopus.com/inward/record.url?scp=85196915107&partnerID=8YFLogxK
M3 - Aufsatz in Konferenzband
AN - SCOPUS:85196915107
SP - 470
EP - 472
BT - MikroSystemTechnik Kongress 2023
PB - VDE Verlag GmbH
T2 - MikroSystemTechnik Kongress 2023: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Nachhaltigkeit und Technologiesouveranitat
Y2 - 23 October 2023 through 25 October 2023
ER -