Details
| Original language | English |
|---|---|
| Title of host publication | European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018 |
| Editors | O. Riemer, Enrico Savio, D. Billington, R. K. Leach, D. Phillips |
| Pages | 151-152 |
| Number of pages | 2 |
| Publication status | Published - 5 Jun 2018 |
| Event | 18th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2018 - Venice, Italy Duration: 4 Jun 2018 → 8 Jun 2018 |
Publication series
| Name | European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018 |
|---|
Abstract
In this investigation, we report about the concept and the novel production process of mono- and multilayer micro grinding tools combining photolithography and joining technology. Main points of the investigation, in addition to the production process, are the achievable surface quality and the process reliability. The use and combination of analytical instruments, such as scanning electron microscopy with elemental analysis ensure the characterization of the defined properties.
Keywords
- Micro grinding, Precision engineering, Ultra-high precision machining
ASJC Scopus subject areas
- Engineering(all)
- Industrial and Manufacturing Engineering
- Physics and Astronomy(all)
- Instrumentation
- Environmental Science(all)
- Environmental Engineering
- Engineering(all)
- Mechanical Engineering
- Materials Science(all)
- General Materials Science
Cite this
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European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018. ed. / O. Riemer; Enrico Savio; D. Billington; R. K. Leach; D. Phillips. 2018. p. 151-152 (European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Flexible mono- and multilayer micro grinding tools for ultra-high precision processing and micro machining
AU - Asadi, Esmail
AU - Hockauf, Rolf
AU - Denkena, Berend
AU - Grove, Thilo
AU - Wurz, Marc
N1 - Funding information: The authors would like to thank the German Research Foundation (DFG) for their organizational and financial support within the?project?“Flexible mono-and multilayer micro grinding tools for ultra-high precision processing and micro machining of ductile?materials” (WU 558/12-1, DE 447/152-1).
PY - 2018/6/5
Y1 - 2018/6/5
N2 - In this investigation, we report about the concept and the novel production process of mono- and multilayer micro grinding tools combining photolithography and joining technology. Main points of the investigation, in addition to the production process, are the achievable surface quality and the process reliability. The use and combination of analytical instruments, such as scanning electron microscopy with elemental analysis ensure the characterization of the defined properties.
AB - In this investigation, we report about the concept and the novel production process of mono- and multilayer micro grinding tools combining photolithography and joining technology. Main points of the investigation, in addition to the production process, are the achievable surface quality and the process reliability. The use and combination of analytical instruments, such as scanning electron microscopy with elemental analysis ensure the characterization of the defined properties.
KW - Micro grinding
KW - Precision engineering
KW - Ultra-high precision machining
UR - http://www.scopus.com/inward/record.url?scp=85054502819&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:85054502819
SN - 9780995775121
T3 - European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018
SP - 151
EP - 152
BT - European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018
A2 - Riemer, O.
A2 - Savio, Enrico
A2 - Billington, D.
A2 - Leach, R. K.
A2 - Phillips, D.
T2 - 18th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2018
Y2 - 4 June 2018 through 8 June 2018
ER -