Firing stability of SiNy/SiNx stacks for the surface passivation of crystalline silicon solar cells

Research output: Contribution to journalArticleResearchpeer review

Authors

  • S. Gatz
  • T. Dullweber
  • V. Mertens
  • F. Einsele
  • R. Brendel

Research Organisations

External Research Organisations

  • Institute for Solar Energy Research (ISFH)
  • Forschungszentrum Jülich
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Details

Original languageEnglish
Pages (from-to)180-185
Number of pages6
JournalSolar Energy Materials and Solar Cells
Volume96
Early online date13 Oct 2011
Publication statusPublished - Jan 2012

Abstract

In the photovoltaic industry contacts to crystalline silicon are typically formed by firing of screen-printed metallization pastes. However, the stability of surface passivation layers during high temperature contact formation is a major challenge. Here, we investigate the thermal stability of the surface passivation by amorphous silicon nitride double layers (SiNy/SiN x). The SiNy passivation layer is silicon rich with refractive index larger than 3. Whereas the SiNx capping layer has a refractive index of 2.05. Compared to pure hydrogenated amorphous silicon, the nitrogen in the SiNy passivation layer improves the firing stability. We achieve an effective surface recombination velocity after a conventional co-firing process of (5.2±2) cm/s on p-type (1.5 Ωcm) FZ-silicon wafers at an injection density of 1015 cm-3. An analysis of the improved firing stability is presented based on FTIR and hydrogen effusion measurements. The incorporation of an SiNy/SiNx stack into the passivated rear of Cz silicon screen-printed solar cells results in an energy conversion efficiency of 18.3% compared to reference solar cells with conventional aluminum back surface field showing 17.9% efficiency. The short circuit current density increases by up to 0.8 mA/cm2 compared to conventional solar cells due to the improved optical reflectance and rear side surface passivation.

Keywords

    PERC solar cell, Screen-printing, Silicon nitride, Surface passivation

ASJC Scopus subject areas

Sustainable Development Goals

Cite this

Firing stability of SiNy/SiNx stacks for the surface passivation of crystalline silicon solar cells. / Gatz, S.; Dullweber, T.; Mertens, V. et al.
In: Solar Energy Materials and Solar Cells, Vol. 96, 01.2012, p. 180-185.

Research output: Contribution to journalArticleResearchpeer review

Gatz S, Dullweber T, Mertens V, Einsele F, Brendel R. Firing stability of SiNy/SiNx stacks for the surface passivation of crystalline silicon solar cells. Solar Energy Materials and Solar Cells. 2012 Jan;96:180-185. Epub 2011 Oct 13. doi: 10.1016/j.solmat.2011.09.051
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@article{a5d6293a641f4c5fb3816b387e325985,
title = "Firing stability of SiNy/SiNx stacks for the surface passivation of crystalline silicon solar cells",
abstract = "In the photovoltaic industry contacts to crystalline silicon are typically formed by firing of screen-printed metallization pastes. However, the stability of surface passivation layers during high temperature contact formation is a major challenge. Here, we investigate the thermal stability of the surface passivation by amorphous silicon nitride double layers (SiNy/SiN x). The SiNy passivation layer is silicon rich with refractive index larger than 3. Whereas the SiNx capping layer has a refractive index of 2.05. Compared to pure hydrogenated amorphous silicon, the nitrogen in the SiNy passivation layer improves the firing stability. We achieve an effective surface recombination velocity after a conventional co-firing process of (5.2±2) cm/s on p-type (1.5 Ωcm) FZ-silicon wafers at an injection density of 1015 cm-3. An analysis of the improved firing stability is presented based on FTIR and hydrogen effusion measurements. The incorporation of an SiNy/SiNx stack into the passivated rear of Cz silicon screen-printed solar cells results in an energy conversion efficiency of 18.3% compared to reference solar cells with conventional aluminum back surface field showing 17.9% efficiency. The short circuit current density increases by up to 0.8 mA/cm2 compared to conventional solar cells due to the improved optical reflectance and rear side surface passivation.",
keywords = "PERC solar cell, Screen-printing, Silicon nitride, Surface passivation",
author = "S. Gatz and T. Dullweber and V. Mertens and F. Einsele and R. Brendel",
year = "2012",
month = jan,
doi = "10.1016/j.solmat.2011.09.051",
language = "English",
volume = "96",
pages = "180--185",
journal = "Solar Energy Materials and Solar Cells",
issn = "0927-0248",
publisher = "Elsevier BV",

}

Download

TY - JOUR

T1 - Firing stability of SiNy/SiNx stacks for the surface passivation of crystalline silicon solar cells

AU - Gatz, S.

AU - Dullweber, T.

AU - Mertens, V.

AU - Einsele, F.

AU - Brendel, R.

PY - 2012/1

Y1 - 2012/1

N2 - In the photovoltaic industry contacts to crystalline silicon are typically formed by firing of screen-printed metallization pastes. However, the stability of surface passivation layers during high temperature contact formation is a major challenge. Here, we investigate the thermal stability of the surface passivation by amorphous silicon nitride double layers (SiNy/SiN x). The SiNy passivation layer is silicon rich with refractive index larger than 3. Whereas the SiNx capping layer has a refractive index of 2.05. Compared to pure hydrogenated amorphous silicon, the nitrogen in the SiNy passivation layer improves the firing stability. We achieve an effective surface recombination velocity after a conventional co-firing process of (5.2±2) cm/s on p-type (1.5 Ωcm) FZ-silicon wafers at an injection density of 1015 cm-3. An analysis of the improved firing stability is presented based on FTIR and hydrogen effusion measurements. The incorporation of an SiNy/SiNx stack into the passivated rear of Cz silicon screen-printed solar cells results in an energy conversion efficiency of 18.3% compared to reference solar cells with conventional aluminum back surface field showing 17.9% efficiency. The short circuit current density increases by up to 0.8 mA/cm2 compared to conventional solar cells due to the improved optical reflectance and rear side surface passivation.

AB - In the photovoltaic industry contacts to crystalline silicon are typically formed by firing of screen-printed metallization pastes. However, the stability of surface passivation layers during high temperature contact formation is a major challenge. Here, we investigate the thermal stability of the surface passivation by amorphous silicon nitride double layers (SiNy/SiN x). The SiNy passivation layer is silicon rich with refractive index larger than 3. Whereas the SiNx capping layer has a refractive index of 2.05. Compared to pure hydrogenated amorphous silicon, the nitrogen in the SiNy passivation layer improves the firing stability. We achieve an effective surface recombination velocity after a conventional co-firing process of (5.2±2) cm/s on p-type (1.5 Ωcm) FZ-silicon wafers at an injection density of 1015 cm-3. An analysis of the improved firing stability is presented based on FTIR and hydrogen effusion measurements. The incorporation of an SiNy/SiNx stack into the passivated rear of Cz silicon screen-printed solar cells results in an energy conversion efficiency of 18.3% compared to reference solar cells with conventional aluminum back surface field showing 17.9% efficiency. The short circuit current density increases by up to 0.8 mA/cm2 compared to conventional solar cells due to the improved optical reflectance and rear side surface passivation.

KW - PERC solar cell

KW - Screen-printing

KW - Silicon nitride

KW - Surface passivation

UR - http://www.scopus.com/inward/record.url?scp=80855134460&partnerID=8YFLogxK

U2 - 10.1016/j.solmat.2011.09.051

DO - 10.1016/j.solmat.2011.09.051

M3 - Article

AN - SCOPUS:80855134460

VL - 96

SP - 180

EP - 185

JO - Solar Energy Materials and Solar Cells

JF - Solar Energy Materials and Solar Cells

SN - 0927-0248

ER -